Patricia D. Beard
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 8 December 1995 Paper
Proc. SPIE. 2621, 15th Annual BACUS Symposium on Photomask Technology and Management
KEYWORDS: Defect detection, Opacity, Databases, Manufacturing, Inspection, Transmittance, Photomasks, Optical proximity correction, Phase measurement, Phase shifts

Proceedings Article | 1 May 1994 Paper
Proc. SPIE. 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII
KEYWORDS: Databases, Image processing, Inspection, Photomasks, Semiconducting wafers, Tolerancing, Defect inspection

Proceedings Article | 15 February 1994 Paper
Proc. SPIE. 2087, 13th Annual BACUS Symposium on Photomask Technology and Management
KEYWORDS: Visual process modeling, Data modeling, Visualization, Databases, Scanners, Inspection, Raster graphics, Computer aided design, Photomask technology, Solid modeling

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