Piston‐mode Fourier based optical imaging created using an adaptation of the base DLP® Products torsional, spatial light modulator technology is presented. Technology, advancements and performance metrics such as, actuation speed, efficiency, and pixel coupling are shown for this 10.8 μm pitched pixel array. Device potential includes upwards of 5.7kframes/sec actuation.
This JM3 special section on emerging MOEMS comprises a collection of excellent papers emphasizing new technologies in MOEMS applications that have come to existence. The section includes outstanding new results in commercial research and development in photonics where micro-optics and MEMS are merged and innovative breakthrough devices come to light.
This paper describes the business scope to which DLP® Products works under with emphasis placed upon some of the
technological complications and challenges present when developing an actuator array with the ultimate intention of
rendering visual content at high-definition and standard video rates. Additionally, some general thoughts on alternative
applications of this spatial light modulation technology are provided.
Interrogation tools are the key to a thorough understanding of any technology. Texas Instruments' DLP(R) Products - Digital Mirror Device is no exception to this rule. We will discuss the application of a non-destructive, through-glass interferometer system toward gaining insight to the degree of structural uniformity of a statistically significant sampling of micro-opto-electromechanical (MOEM) mirrors as used in our product line. In the course of providing this information, instrumentation details such as reliability and reproducibility of measurements obtained on this interferometer will be discussed. Additionally, the importance of this mechanical uniformity to displaying images with this spatial light modulator (SLM) will be discussed as well.
Proc. SPIE. 3491, 1998 International Conference on Applications of Photonic Technology III: Closing the Gap between Theory, Development, and Applications
The effects of the local dielectric environment on the surface-plasmon resonances of annealed gold-island films are studied experimentally and modeled theoretically. Gold- island films were annealed at 600 degree(s)C to produce spheroidal shape particles which exhibit well-resolved resonances in polarized, angle-resolved, absorption spectra. These resonances are shifted in different amounts by the depolarization effect of the surrounding medium (liquids with various refraction indices). Cross-section calculations based upon non-retarded, single-particle, dielectric interaction for these various configurations are presented and found to be in good agreement with the experimental observations.
Proc. SPIE. 3491, 1998 International Conference on Applications of Photonic Technology III: Closing the Gap between Theory, Development, and Applications
In this paper the results of detecting volatile organic compounds (VOC) employing surface plasmon-based sensors are presented. The initial step in preparing the sensing elements herein requires depositing Au degree(s) on a quartz slide. The sensing elements are based on either (1) freshly deposited Au degree(s) or (2) growth of a self assembled monolayer composite film (SAM) on to a freshly deposited Au degree(s) surface. The desired SAM is either (1) acid terminated using (omega) -mercaptoundecanoic acid (MUA-COOH) or (2) Cu2+ metal ion terminated yielding (omega) - mercaptoundecanoic acid-Cu2+ (MUA-Cu2+). The experimental apparatus shown here measures the reflectivity of the Au degree(s) surface as a function of time at a given angle. The response of this surface plasmon device to various VOC's is correlated to the composition of the SAM film.
Selectively coated cantilevers are being developed at ORNL for chemical and biological sensing. The sensitivity can exceed that of other electro-mechanical devices as parts- per-trillion detection can be demonstrated for certain species. We are now proceeding to develop systems that employ electrically readable microcantilevers in a standard MEMS process and standard CMOS processes. One of our primary areas of interest is chemical sensing for environmental applications. Towards this end, we are presently developing electronic readout of a mercury-sensitive coated cantilever. In order to field arrays of distributed sensors, a wireless network for data reporting is needed. For this, we are developing on-chip spread-spectrum encoding and modulation circuitry to improve the robustness and security of sensor data in typical interference- and multipath-impaired environments. We have also provided for a selection of distinct spreading codes to serve groups of sensors in a common environment by the application of code-division multiple-access techniques. Most of the RF circuity we have designed and fabricated in 0.5 micrometers CMOS has been tested and verified operational to above 1 GHz. Our initial intended operation is for use in the 915 MHz Industrial, Scientific, and Medical band. This paper presents measured data on the microcantilever-based mercury detector. We will also present design data and measurements of the RF telemetry chip.
Uncooled infrared sensors are significant in a number of scientific and technological applications. A new approach to uncooled infrared detectors has been developed using piezoresistive microcantilevers coated with thermal energy absorbing material(s). Infrared radiation absorbed by the microcantilever detector can be sensitively detected as changes in the electrical resistance as a function of microcantilever bending. These devices have demonstrated sensitivities comparable to existing uncooled thermal detector technologies. The dynamic range of these devices is extremely large due to measurable resistance change obtained with only nanometer level cantilever displacement. Optimization of geometrical properties for selected commercially available cantilevers is presented. Additionally, we present results obtained from a modeling analysis of the thermal properties of several different microcantilever detector architectures.
The feasibility of micromechanical optical and infrared (IR) detection using microcantilevers is demonstrated. Microcantilevers provide a simple means for developing single- and multi-element sensors for visible and infrared radiation that are smaller, more sensitive and lower in cost than quantum or thermal detectors. Microcantilevers coated with a heat absorbing layer undergo bending due to the differential stress originating from the bimetallic effect. Bending is proportional to the amount of heat absorbed and can be detected using optical or electrical methods such as resistance changes in piezoresistive cantilevers. The microcantilever sensors exhibit two distinct thermal responses: a fast one ((tau) 1thermal less than ms) and a slower one ((tau) 2thermal approximately 10 ms). A noise equivalent temperature difference, NEDT equals 90 mK was measured. When uncoated microcantilevers were irradiated by a low-power diode laser ((lambda) equals 786 nm) the noise equivalent power, NEP, was found to be 3.5 nW/(root)Hz which corresponds to a specific detectivity, D*, of 3.6 multiplied by 107 cm (DOT) (root)Hz/W at a modulation frequency of 20 Hz.
We describe a lithographic technique using atomic force microscopy (AFM) to expose commercially available photoresists in a controllable manner. In contrast to scanning tunneling microscopy lithography on photoresists, the AFM has the advantage of having better control of the contact force between the probe tip and sample and thus reduces the possibility of physical damage to the resist material during exposure. Using a metal coated cantilever, we have been able to create resist patterns at the nanometer-scale.
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