Dr. Paul C. Allen
Program Manager at Applied Materials
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
KEYWORDS: Printing, Photomasks, Raster graphics, Extreme ultraviolet, Data conversion, Laser optics, Data processing, Deep ultraviolet

Proceedings Article | 15 February 2012 Paper
Proc. SPIE. 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V
KEYWORDS: Photomasks, Calibration, Lithography, Photoresist materials, Transmittance, Semiconducting wafers, Etching, Manufacturing, Data modeling, Silicon

SPIE Journal Paper | 1 July 2007
JM3 Vol. 6 Issue 03
KEYWORDS: Bragg cells, Acousto-optics, Acoustics, Photomasks, Spiral phase plates, Transducers, Phase shift keying, Optical lithography, Spatial filters, Image enhancement

Proceedings Article | 5 November 2005 Paper
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Photomasks, Deep ultraviolet, Artificial intelligence, Printing, Metals, Lithography, Semiconducting wafers, Bragg cells, Evolutionary algorithms, Optical alignment

Proceedings Article | 5 November 2005 Paper
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Critical dimension metrology, Printing, Photoresist processing, Error analysis, Composites, Calibration, Standards development, Plasma etching, Logic, Metals

Showing 5 of 13 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top