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Paul Digraci
at Lab des Technologies de La Microélectronique
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Publications (1)
Proceedings Article | 26 May 2022 Presentation + Paper
Multi-branch neural network for hybrid metrology improvement
Proceedings Volume 12053, 120530W (2022) https://doi.org/10.1117/12.2612798
KEYWORDS: Metrology, Neurons, Statistical analysis, Neural networks, Data modeling, Data fusion, Critical dimension metrology, Artificial neural networks
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