Mr. Paul S. Filitchkin Profile

Paul S. Filitchkin

at Siemens Industry Software Inc

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Publications (1)

Proceedings Article | 24 March 2009 Paper

Contour quality assessment for OPC model calibration

Paul Filitchkin, Thuy Do, Ir Kusnadi, John Sturtevant, Peter de Bisschop, Jeroen Van de Kerkhove

Proceedings Volume 7272, 72722Q (2009) https://doi.org/10.1117/12.814662

KEYWORDS: Calibration, Scanning electron microscopy, Optical proximity correction, Statistical modeling, Visualization, Error analysis, Data modeling, Printing, Metrology, Image filtering

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