Dr. Paul F. McClure Profile

Dr. Paul F. McClure

President and Chief Executive Officer at Xidex Corp

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Publications (3)

Proceedings Article | 15 September 2010 Paper

Conductive carbon nanotubes for semiconductor metrology

Joseph Kopanski, Ilona Sitnitsky, Vladimir Mancevski, Vince LaBella, Paul McClure, Philp Rack, Matthew Bresin, Victor Vartanian, Kathleen Dunn

Proceedings Volume 7767, 77670F (2010) https://doi.org/10.1117/12.861315

KEYWORDS: Resistance, Particle filters, Silicon, Metrology, Scanning probe microscopy, Scanning tunneling microscopy, Metals, Etching, Capacitance, Transmission electron microscopy

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Proceedings Article | 10 May 2005 Paper

Calibration of a dual probe NanoCaliper AFM for CD metrology

Paul McClure, Vladimir Mancevski

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599063

KEYWORDS: Calibration, Lawrencium, Critical dimension metrology, Diffraction, Data modeling, Hassium, Sensors, Capillaries, Atomic force microscopy, Stereolithography

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Proceedings Article | 16 July 2002 Paper

Development of a dual-probe Caliper CD-AFM for near model-independent nanometrology

Paul McClure, Vladimir Mancevski

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473418

KEYWORDS: Calibration, Prototyping, Atomic force microscopy, Scanning electron microscopy, Scanning probe microscopy, Manufacturing, Silicon, Sensing systems, Oscillators, Distance measurement

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