Prof. Paul F. Nealey
Professor at Univ of Chicago
SPIE Involvement:
Author | Instructor
Publications (57)

Proceedings Article | 12 April 2021 Presentation + Paper
Proc. SPIE. 11723, Image Sensing Technologies: Materials, Devices, Systems, and Applications VIII

Proceedings Article | 5 March 2021 Presentation
Proc. SPIE. 11695, High Contrast Metastructures X
KEYWORDS: Switches, Switching, Titanium dioxide, Optical properties, Visualization, Wavefront sensors, Wavefronts, Liquid crystals, Space operations, Near field optics

Proceedings Article | 22 February 2021 Presentation
Proc. SPIE. 11610, Novel Patterning Technologies 2021
KEYWORDS: Optical lithography, Etching, Annealing, Manufacturing, Directed self assembly

Proceedings Article | 3 April 2020 Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Lithography, Metrology, Optical lithography, Etching, Photomasks, Directed self assembly, Immersion lithography, Critical dimension metrology, Semiconducting wafers

SPIE Journal Paper | 10 October 2019
JM3 Vol. 18 Issue 04
KEYWORDS: Bridges, Annealing, Directed self assembly, Data modeling, Etching, Scanning electron microscopy, Polymethylmethacrylate, Picosecond phenomena, Wet etching, Optical inspection

Showing 5 of 57 publications
Course Instructor
SC1067: Directed Self Assembly and its Application to Nanoscale Fabrication
This course explains basic principles and applications of directed self assembly (DSA), with particular emphasis on block copolymer directed self assembly. A primary goal of the course is to present in a systematic manner the central issues that govern directed self assembly, and to do so in a way that will enable current and future practicioners of directed self assembly to rapidly identify the potential and limitations of this technique for specific applications. Anyone who wants to answer questions such as, "what structures can I create, how robust are certain processes, or what materials should I employ" will benefit from taking this course.
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