Dr. Pawan Kumar Profile

Dr. Pawan Kumar

at imec

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Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper

Advanced EUV patterning of 2D TMDs for CMOS integration

Vina Faramarzi, Etienne de Poortere, Syam Parayil Venugopalan, Pieter Woltgens, Youngtag Woo, Mark van de Kerkhof, Pawan Kumar, Henry Medina Silva, Pierre Morin, Inge Asselberghs, Chelsey Dorow, Kevin O'Brien, Kirby Maxey, Uygar Avci

Proceedings Volume 12956, 129560I (2024) https://doi.org/10.1117/12.3011818

KEYWORDS: Extreme ultraviolet lithography, Extreme ultraviolet, Optical lithography, Photons, Electrons, 2D materials, Field effect transistors, Direct write lithography, Advanced patterning

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