Dr. Peng Bu Profile

Dr. Peng Bu

Manager Advanced Development at Visionix

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Publications (6)

Proceedings Article | 13 March 2012 Paper

Symmetric polarization aberration compensation method based on scalar aberration control for lithographic projection lens

Yuanying Tu, Xiangzhao Wang, Sikun Li, Lifeng Duan, Peng Bu

Proceedings Volume 8326, 83262T (2012) https://doi.org/10.1117/12.917909

KEYWORDS: Polarization, Lithography, Photomasks, Matrices, Resolution enhancement technologies, Birefringence, Critical dimension metrology, Wave plates, Polarizers, Received signal strength

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Proceedings Article | 5 October 2011 Paper

Analytical model for EUV mask diffraction field calculation

Yuting Cao, Xiangzhao Wang, Andreas Erdmann, Peng Bu, Yang Bu

Proceedings Volume 8171, 81710N (2011) https://doi.org/10.1117/12.896579

KEYWORDS: Photomasks, Diffraction, Mirrors, Extreme ultraviolet, Reflectivity, Systems modeling, Extreme ultraviolet lithography, Error analysis, Scattering, Calibration

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SPIE Journal Paper | 1 May 2008 Open Access

One-shot parallel complex Fourier-domain optical coherence tomography using a spatial carrier frequency

Peng Bu, Xiangzhao Wang, Osami Sasaki

OE, Vol. 47, Issue 05, 050502, (May 2008) https://doi.org/10.1117/12.10.1117/1.2931575

KEYWORDS: CCD cameras, Mirrors, Optical coherence tomography, Wavefronts, Glasses, Fourier transforms, Spatial frequencies, Imaging systems, Image resolution, Range imaging

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Proceedings Article | 17 January 2008 Paper

Method for eliminating the influence of light intensity modulation in sinusoidal phase modulating laser diode interferometer

Zhongliang Li, Xiangzhao Wang, Bingjie Huang, Peng Bu, Defeng Zheng

Proceedings Volume 6723, 67230Y (2008) https://doi.org/10.1117/12.783072

KEYWORDS: Modulation, Interferometers, Semiconductor lasers, Phase shift keying, Phase modulation, Signal detection, Computer simulations, Signal processing, Ferroelectric materials, Light sources

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Proceedings Article | 8 January 2008 Paper

High-speed full range complex Fourier-domain optical coherence tomography using sinusoidal phase-modulating interferometry

Peng Bu, Xiangzhao Wang, Osami Sasaki, Xunbin Wei

Proceedings Volume 6826, 682605 (2008) https://doi.org/10.1117/12.756756

KEYWORDS: CCD cameras, Interferometry, Skin, Optical coherence tomography, Fourier transforms, Phase interferometry, Phase modulation, Interfaces, Mirrors, Biomedical optics

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SPIE Journal Paper | 1 October 2007

Dynamic full-range Fourier-domain optical coherence tomography using sinusoidal phase-modulating interferometry

Peng Bu, Xiangzhao Wang, Osami Sasaki

OE, Vol. 46, Issue 10, 105603, (October 2007) https://doi.org/10.1117/12.10.1117/1.2798540

KEYWORDS: Optical coherence tomography, Interferometry, Interfaces, Phase interferometry, CCD cameras, Glasses, Imaging systems, Phase shifts, Mirrors, Phase shift keying

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Showing 5 of 6 publications

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