Dr. Peng Su Profile

Dr. Peng Su

Assistant Research Professor, Optical Science at ASML US Inc

SPIE Involvement:

Conference Program Committee | Author

Publications (38)

Proceedings Article | 14 September 2018 Presentation + Paper

Model-free optical surface reconstruction from deflectometry data

L. Graves, H. Choi, W. Zhao, C. J. Oh, P. Su, T. Su, D. W. Kim

Proceedings Volume 10742, 107420Y (2018) https://doi.org/10.1117/12.2320745

KEYWORDS: Deflectometry, Cameras, Data modeling, Interferometry, Freeform optics, Monochromatic aberrations, Systems modeling, Metrology, Computer generated holography, Ray tracing

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Proceedings Article | 22 July 2016 Paper

Fabrication and testing of 4.2m off-axis aspheric primary mirror of Daniel K. Inouye Solar Telescope

Chang Jin Oh, Andrew Lowman, Greg Smith, Peng Su, Run Huang, Tianquan Su, Daewook Kim, Chunyu Zhao, Ping Zhou, James Burge

Proceedings Volume 9912, 99120O (2016) https://doi.org/10.1117/12.2229324

KEYWORDS: Mirrors, Optical fabrication, Metrology, Interferometry, Off axis mirrors, Bidirectional reflectance transmission function, Mirrors, Solar telescopes, Surface finishing, Solar telescopes, Computer generated holography, Aspheric lenses

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Proceedings Article | 16 November 2015 Paper

Integrated Ray Tracing (IRT) simulation of SCOTS measurement of GMT fast steering mirror surface

Ji Nyeong Choi, Dongok Ryu, Sug-Whan Kim, Logan Graves, Peng Su, Run Huang, Dae Wook Kim

Proceedings Volume 9575, 957513 (2015) https://doi.org/10.1117/12.2188845

KEYWORDS: Mirrors, Cameras, Ray tracing, Sensors, Device simulation, Computer simulations, Image analysis, Zernike polynomials, Error analysis, Scattering

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Proceedings Article | 27 August 2015 Paper

Deflectometry measurement of Daniel K. Inouye Solar Telescope primary mirror

Run Huang, Peng Su, James Burge

Proceedings Volume 9575, 957515 (2015) https://doi.org/10.1117/12.2189258

KEYWORDS: Cameras, Mirrors, LCDs, Calibration, Metrology, Lens design, Optical testing, Deflectometry, Imaging systems, Aspheric lenses

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SPIE Journal Paper | 5 August 2015

High-accuracy aspheric x-ray mirror metrology using Software Configurable Optical Test System/deflectometry

Run Huang, Peng Su, James Burge, Lei Huang, Mourad Idir

OE, Vol. 54, Issue 08, 084103, (August 2015) https://doi.org/10.1117/12.10.1117/1.OE.54.8.084103

KEYWORDS: Mirrors, Calibration, Cameras, X-ray optics, X-rays, Optical testing, Metrology, Distortion, Aspheric lenses, Monochromatic aberrations

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Proceedings Article | 8 September 2014 Paper

Aligning and testing non-null optical system with deflectometry

Weirui Zhao, Run Huang, Peng Su, James Burge

Proceedings Volume 9195, 91950F (2014) https://doi.org/10.1117/12.2062510

KEYWORDS: Cameras, Mirrors, Optical testing, Monochromatic aberrations, Imaging systems, Deflectometry, Wavefronts, Calibration, Distortion, Telescopes

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SPIE Journal Paper | 15 August 2014

Optical metrology of a large deformable aspherical mirror using software configurable optical test system

Run Huang, Peng Su, Todd Horne, Guido Brusa, James Burge

OE, Vol. 53, Issue 08, 085106, (August 2014) https://doi.org/10.1117/12.10.1117/1.OE.53.8.085106

KEYWORDS: Mirrors, Monochromatic aberrations, Cameras, Beam splitters, Deformable mirrors, LCDs, Optical metrology, Optical testing, Wavefronts, Aspheric lenses

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Proceedings Article | 7 August 2014 Paper

Production of primary mirror segments for the Giant Magellan Telescope

H. Martin, R. Allen, J. Burge, J. Davis, W. Davison, M. Johns, D. Kim, J. Kingsley, K. Law, R. Lutz, P. Strittmatter, P. Su, M. Tuell, S. West, P. Zhou

Proceedings Volume 9151, 91510J (2014) https://doi.org/10.1117/12.2057012

KEYWORDS: Mirrors, Monochromatic aberrations, Telescopes, Image segmentation, Polishing, Surface finishing, Optical testing, Active optics, Wavefronts, Sensors

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Proceedings Article | 28 July 2014 Paper

Measuring large mirrors using SCOTS: the Software Configurable Optical Test System

J. Burge, P. Su, G. Butel, R. Huang, A. Maldonado, T. Su

Proceedings Volume 9151, 91510Z (2014) https://doi.org/10.1117/12.2057726

KEYWORDS: Mirrors, Cameras, Optical testing, Interferometry, Imaging systems, Deflectometry, Aspheric lenses, Modulation, Calibration, Light

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Proceedings Article | 22 July 2014 Paper

Development of a wide field spherical aberration corrector for the Hobby Eberly Telescope: design, fabrication and alignment

Chang Jin Oh, Eric Frater, Andrew Lowman, Peng Su, Chunyu Zhao, Ping Zhou, James Burge

Proceedings Volume 9145, 914509 (2014) https://doi.org/10.1117/12.2056879

KEYWORDS: Mirrors, Computer generated holography, Monochromatic aberrations, Optical alignment, Tolerancing, Telescopes, Optical instrument design, Optical testing, Optical fabrication, Aspheric optics

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Proceedings Article | 19 December 2013 Paper

Study of the instrument transfer function of a free-form optics metrology system: SCOTS

Tianquan Su, Alejandro Maldonado, Peng Su, Ping Zhou, James Burge

Proceedings Volume 9046, 904602 (2013) https://doi.org/10.1117/12.2037040

KEYWORDS: Mirrors, Cameras, Imaging systems, Point spread functions, Modulation transfer functions, Deflectometry, Spatial frequencies, Metrology, Interferometry, X-rays

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SPIE Journal Paper | 2 December 2013

Aspheric and freeform surfaces metrology with software configurable optical test system: a computerized reverse Hartmann test

Peng Su, Manal Khreishi, Tianquan Su, Run Huang, Margaret Dominguez, Alejandro Maldonado, Guillaume Butel, Yuhao Wang, Robert Parks, James Burge

OE, Vol. 53, Issue 03, 031305, (December 2013) https://doi.org/10.1117/12.10.1117/1.OE.53.3.031305

KEYWORDS: Cameras, Mirrors, Calibration, Aspheric lenses, Optical testing, Interferometry, Freeform optics, Metrology, Deflectometry, Imaging systems

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Proceedings Article | 27 September 2013 Paper

X-ray mirror metrology using SCOTS/deflectometry

Run Huang, Peng Su, James Burge, Mourad Idir

Proceedings Volume 8848, 88480G (2013) https://doi.org/10.1117/12.2024500

KEYWORDS: Mirrors, Cameras, Calibration, X-rays, Optical testing, Spherical lenses, LCDs, Metrology, X-ray optics, Imaging systems

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Proceedings Article | 7 September 2013 Paper

Measurement of a large deformable aspherical mirror using SCOTS (Software Configurable Optical Test System)

Run Huang, Peng Su, Todd Horne, Guido Brusa Zappellini, Jim Burge

Proceedings Volume 8838, 883807 (2013) https://doi.org/10.1117/12.2024336

KEYWORDS: Mirrors, Cameras, Monochromatic aberrations, LCDs, Deformable mirrors, Optical testing, Imaging systems, Aspheric lenses, Beam splitters, Observatories

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Proceedings Article | 7 September 2013 Paper

Subaperture stitching performance estimation

Greg Smith, Chunyu Zhao, Peng Su, James Burge

Proceedings Volume 8838, 88380D (2013) https://doi.org/10.1117/12.2023643

KEYWORDS: Monte Carlo methods, Error analysis, Optical testing, Ions, Neodymium, Computer simulations, Calibration, Chromium, Fourier transforms, Yield improvement

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Proceedings Article | 13 May 2013 Paper

Precision aspheric optics testing with SCOTS: a deflectometry approach

Peng Su, Manal Khreishi, Run Huang, Tianquan Su, James Burge

Proceedings Volume 8788, 87881E (2013) https://doi.org/10.1117/12.2020721

KEYWORDS: Mirrors, Cameras, Calibration, Interferometry, Optical testing, Deflectometry, Aspheric optics, Spherical lenses, Large Synoptic Survey Telescope, Sensors

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Proceedings Article | 25 October 2012 Paper

Optical testing for meter size aspheric optics

Peng Su, Chang Jin Oh, Chunyu Zhao, James Burge

Proceedings Volume 8466, 84660S (2012) https://doi.org/10.1117/12.930513

KEYWORDS: Mirrors, System on a chip, Computer generated holography, Interferometry, Aspheric lenses, Surface finishing, Wavefronts, Optical testing, Aspheric optics, Sensors

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Proceedings Article | 13 September 2012 Paper

SCOTS: a reverse Hartmann test with high dynamic range for Giant Magellan Telescope primary mirror segments

Peng Su, Shanshan Wang, Manal Khreishi, Yuhao Wang, Tianquan Su, Ping Zhou, Robert Parks, Kevin Law, Mario Rascon, Tom Zobrist, Hubert Martin, James Burge

Proceedings Volume 8450, 84500W (2012) https://doi.org/10.1117/12.926719

KEYWORDS: Mirrors, Interferometry, Cameras, Optical spheres, Calibration, Optical testing, Surface finishing, Telescopes, Reflection, Imaging systems

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Proceedings Article | 13 September 2012 Paper

Production of 8.4m segments for the Giant Magellan Telescope

H. Martin, R. Allen, J. Burge, D. W. Kim, J. Kingsley, K. Law, R. Lutz, P. Strittmatter, P. Su, M. Tuell, S. West, P. Zhou

Proceedings Volume 8450, 84502D (2012) https://doi.org/10.1117/12.926347

KEYWORDS: Mirrors, Telescopes, Polishing, Wavefronts, Surface finishing, Glasses, Computer generated holography, Interferometers, Aspheric lenses, Image segmentation

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Proceedings Article | 13 September 2012 Paper

SCOTS: a useful tool for specifying and testing optics in slope space

Margaret Dominguez, John Armstrong, Peng Su, Robert Parks, James Burge

Proceedings Volume 8493, 84931D (2012) https://doi.org/10.1117/12.931112

KEYWORDS: Optical testing, Wavefronts, Mirrors, Lenses, X-ray optics, Optics manufacturing, Interferometry, Wavefront sensors, LCDs, Zemax

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SPIE Journal Paper | 6 July 2012

Swing arm optical coordinate-measuring machine: high precision measuring ground aspheric surfaces using a laser triangulation probe

Yuhao Wang, Peng Su, Robert Parks, Chang Jin Oh, James Burge

OE, Vol. 51, Issue 7, 073603, (July 2012) https://doi.org/10.1117/12.10.1117/1.OE.51.7.073603

KEYWORDS: Sensors, System on a chip, Calibration, Surface finishing, Aspheric lenses, Mirrors, Interferometry, Distance measurement, Polishing, Sensor calibration

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SPIE Journal Paper | 6 April 2012

Swing-arm optical coordinate measuring machine: modal estimation of systematic errors from dual probe shear measurements

Peng Su, Robert Parks, Yuhao Wang, Chang Jin Oh, James Burge

OE, Vol. 51, Issue 4, 043604, (April 2012) https://doi.org/10.1117/12.10.1117/1.OE.51.4.043604

KEYWORDS: Error analysis, System on a chip, Calibration, Interferometry, Aspheric lenses, Mirrors, Optical engineering, Sensors, Profilometers, Optical testing

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Proceedings Article | 3 November 2011 Paper

Software configurable optical test system for refractive optics

Margaret Dominguez, Lirong Wang, Peng Su, Robert Parks, James Burge

Proceedings Volume 8011, 80116Q (2011) https://doi.org/10.1117/12.900879

KEYWORDS: LCDs, Wavefronts, Cameras, Spherical lenses, Optical testing, CCD cameras, Imaging systems, Deflectometry, Monochromatic aberrations, Optics manufacturing

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Proceedings Article | 27 September 2011 Paper

Swing arm optical CMM: self calibration with dual probe shear test

Peng Su, Yuhao Wang, Chang Jin Oh, Robert Parks, James Burge

Proceedings Volume 8126, 81260W (2011) https://doi.org/10.1117/12.894203

KEYWORDS: System on a chip, Calibration, Aspheric lenses, Interferometry, Mirrors, Error analysis, Wavefronts, Profilometers, Optical testing, Optical calibration

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Proceedings Article | 27 September 2011 Paper

Scanning Long-wave Optical Test System: a new ground optical surface slope test system

Tianquan Su, Won Hyun Park, Robert Parks, Peng Su, James Burge

Proceedings Volume 8126, 81260E (2011) https://doi.org/10.1117/12.892666

KEYWORDS: Cameras, Mirrors, Optical testing, Sensors, Surface finishing, Long wavelength infrared, Optical scanning systems, Thermography, Specular reflections, Polishing

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Proceedings Article | 27 May 2011 Paper

Software configurable optical test system for refractive optics

Margaret Dominguez, Lirong Wang, Peng Su, Robert Parks, James Burge

Proceedings Volume 8082, 80823H (2011) https://doi.org/10.1117/12.890026

KEYWORDS: LCDs, Wavefronts, Cameras, Spherical lenses, Optical testing, CCD cameras, Imaging systems, Deflectometry, Monochromatic aberrations, Optics manufacturing

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Proceedings Article | 9 September 2010 Paper

A low-cost, flexible, high dynamic range test for free-form illumination optics

Lirong Wang, Peng Su, Robert Parks, Roger Angel, Jose Sasian, James Burge

Proceedings Volume 7652, 76521H (2010) https://doi.org/10.1117/12.873980

KEYWORDS: Cameras, Mirrors, Reflectors, Solar concentrators, Headlamps, Optical testing, Aspheric optics, Zemax, High dynamic range imaging, Aspheric lenses

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Proceedings Article | 19 July 2010 Paper

Scanning pentaprism test for the GMT 8.4-m off-axis segments

Richard Allen, Peng Su, James Burge, Brian Cuerden, Hubert Martin

Proceedings Volume 7739, 773911 (2010) https://doi.org/10.1117/12.857901

KEYWORDS: Mirrors, Prisms, Cameras, Off axis mirrors, Monochromatic aberrations, Wavefronts, Collimation, Telescopes, Interferometry, Sensors

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Proceedings Article | 22 August 2009 Paper

Fabrication and testing of 1.4-m convex off-axis aspheric optical surfaces

James Burge, S. Benjamin, D. Caywood, C. Noble, M. Novak, C. Oh, R. Parks, B. Smith, P. Su, M. Valente, C. Zhao

Proceedings Volume 7426, 74260L (2009) https://doi.org/10.1117/12.828513

KEYWORDS: Computer generated holography, Surface finishing, Aspheric lenses, Optical spheres, Polishing, System on a chip, Optics manufacturing, Optical testing, Wavefronts, Optical fabrication

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Proceedings Article | 22 August 2009 Paper

Swing-arm optical CMM for aspherics

Peng Su, Chang Jin Oh, Robert Parks, James Burge

Proceedings Volume 7426, 74260J (2009) https://doi.org/10.1117/12.828493

KEYWORDS: System on a chip, Mirrors, Interferometry, Calibration, Aspheric lenses, Profilometers, Optical testing, Computer programming, Aspheric optics, In situ metrology

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Proceedings Article | 22 August 2009 Paper

Scanning pentaprism measurements of off-axis aspherics II

Peng Su, James Burge, Brian Cuerden, Richard Allen, Hubert Martin

Proceedings Volume 7426, 74260Y (2009) https://doi.org/10.1117/12.828497

KEYWORDS: Mirrors, Off axis mirrors, Prisms, Sensors, Monochromatic aberrations, Interferometry, Aspheric lenses, Projection systems, Collimation, CCD image sensors

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Proceedings Article | 25 July 2008 Paper

Scanning pentaprism measurements of off-axis aspherics

Peng Su, James Burge, Brian Cuerden, Jose Sasian, Hubert Martin

Proceedings Volume 7018, 70183T (2008) https://doi.org/10.1117/12.789588

KEYWORDS: Mirrors, Prisms, Projection systems, Monochromatic aberrations, Off axis mirrors, Collimation, Error analysis, Sensors, Wavefronts, Interferometry

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Proceedings Article | 25 July 2008 Paper

Optical metrology for very large convex aspheres

J. Burge, P. Su, C. Zhao

Proceedings Volume 7018, 701818 (2008) https://doi.org/10.1117/12.790063

KEYWORDS: Mirrors, Aspheric lenses, Profilometers, Monte Carlo methods, Polarization, Monochromatic aberrations, Interferometers, Computer generated holography, Phase shifting, Phase modulation

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Proceedings Article | 25 July 2008 Paper

Optical surface measurements for very large flat mirrors

J. Burge, P. Su, J. Yellowhair, C. Zhao

Proceedings Volume 7018, 701817 (2008) https://doi.org/10.1117/12.790048

KEYWORDS: Mirrors, Autocollimators, Error analysis, Prisms, Optical testing, Monte Carlo methods, Phase shifting, Monochromatic aberrations, Polarization, Metrology

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Proceedings Article | 21 September 2007 Paper

Use of a commercial laser tracker for optical alignment

James Burge, Peng Su, Chunyu Zhao, Tom Zobrist

Proceedings Volume 6676, 66760E (2007) https://doi.org/10.1117/12.736705

KEYWORDS: Mirrors, Optical tracking, Retroreflectors, Optical testing, Optical alignment, Interferometers, Laser optics, Computer generated holography, 3D metrology, Metrology

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Proceedings Article | 14 September 2007 Paper

Fabrication and testing of large flats

Julius Yellowhair, Peng Su, Matt Novak, Jim Burge

Proceedings Volume 6671, 667107 (2007) https://doi.org/10.1117/12.736775

KEYWORDS: Mirrors, Polishing, Surface finishing, Manufacturing, Glasses, Optical fabrication, Fizeau interferometers, Zerodur, Computer simulations, Optics manufacturing

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Proceedings Article | 14 September 2007 Paper

Shear test of the off-axis surface with an axis-symmetric parent

Peng Su, James Burge, Jose Sasian

Proceedings Volume 6671, 66710R (2007) https://doi.org/10.1117/12.731971

KEYWORDS: Error analysis, Optical testing, Mirrors, Monochromatic aberrations, Aspheric optics, Interferometers, Aspheric lenses, Zernike polynomials, Analytical research, Signal generators

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Proceedings Article | 12 July 2006 Paper

Maximum likelihood estimation as a general method of combining subaperture data for interferometric testing

Peng Su, Jim Burge, Robert Sprowl, Jose Sasian

Proceedings Volume 6342, 63421X (2006) https://doi.org/10.1117/12.692233

KEYWORDS: Mirrors, Modulation, Error analysis, Interferometry, Interferometers, Calibration, Software development, Aspheric lenses, Optical testing, Analytical research

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