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Peng Tang
at Univ of Oklahoma
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Author
Publications (3)
Proceedings Article | 13 March 2018 Paper
Assessment of local variability by high-throughput e-beam metrology for prediction of patterning defect probabilities
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Electron beam lithography, Metrology, Deep ultraviolet, Inspection, Scanning electron microscopy, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Stochastic processes
Proceedings Article | 15 April 2011 Paper
Initial design and validation of packaging directional antennas for structural health and road condition monitoring
Proc. SPIE. 7981, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2011
KEYWORDS: Packaging, Roads, Sensors, Numerical simulations, Civil engineering, Bridges, Antennas, Wireless communications, Electromagnetism, Absorption
Proceedings Article | 15 November 2007 Paper
Stochastic approach based salient moving object detection using kernel density estimation
Proc. SPIE. 6786, MIPPR 2007: Automatic Target Recognition and Image Analysis; and Multispectral Image Acquisition
KEYWORDS: Statistical analysis, Detection and tracking algorithms, Video, Particles, Video surveillance, Monte Carlo methods, Optical flow, Motion models, Stochastic processes, Expectation maximization algorithms
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