Peng Wang
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 22 December 2015 Paper
Proc. SPIE. 9668, Micro+Nano Materials, Devices, and Systems
KEYWORDS: Wafer-level optics, Refractive index, Polishing, Silica, Waveguides, Cladding, Etching, Interfaces, Silicon, Telecommunications, Optical alignment, Semiconducting wafers, Tolerancing, Surface finishing

Proceedings Article | 22 December 2015 Paper
Proc. SPIE. 9668, Micro+Nano Materials, Devices, and Systems
KEYWORDS: Actuators, Thin films, Ferroelectric materials, Sensors, Silicon, Microopto electromechanical systems, Micro optics, Resistors, Thin film devices, Electric field sensors, Piezoresistive sensors, Wheatstone bridges

Proceedings Article | 7 December 2013 Paper
Proc. SPIE. 8923, Micro/Nano Materials, Devices, and Systems
KEYWORDS: Actuators, Thin films, Ferroelectric materials, Waveguides, Cladding, Sensors, Silicon, Atomic force microscopy, Silicon films, Geometrical optics

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top