Dr. Peng Xu
at Xiamen Univ
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 1 May 2008 Paper
Haisheng San, Xuyuan Chen, Peng Xu, Fangqiang Li, Meiying Cheng
Proceedings Volume 6940, 69401T (2008) https://doi.org/10.1117/12.777259
KEYWORDS: Thermography, Infrared radiation, Modulation, Semiconducting wafers, Microelectromechanical systems, Infrared imaging, Silicon, Deep reactive ion etching, Silica, Temperature metrology

Proceedings Article | 30 April 2008 Paper
Proceedings Volume 6959, 695917 (2008) https://doi.org/10.1117/12.777093
KEYWORDS: Resistance, Magnetism, Electron beam lithography, Switches, Gold, Temperature metrology, Iron, Electronic components, Electron transport, Ferromagnetics

Proceedings Article | 4 January 2008 Paper
Proceedings Volume 6836, 68360K (2008) https://doi.org/10.1117/12.756390
KEYWORDS: Switches, Dielectrics, Microelectromechanical systems, Bridges, Capacitors, Silicon, Metals, Reliability, Capacitance, Aluminum

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