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Petcharin Pornnoppadol
at PTB
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Publications (1)
Proceedings Article | 24 April 2003 Paper
Novel three-axis silicon probe with integrated circuit on chip for microsystem components
Vladimir Nesterov, Petcharin Pornnoppadol, Uwe Brand, Ralph Wilke, M. Schmidt, Stephanus Buettgenbach
Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.499264
KEYWORDS: Temperature metrology, Doping, Silicon, Wheatstone bridges, 3D metrology, Bridges, Resistance, Integrated circuits, Microsystems, Resistors
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