Peter Buck
Director Marketing-MPC & Mask Defect Management at Mentor - A Siemens Business
SPIE Involvement:
Conference Program Committee | Track Chair | Author | Editor
Area of Expertise:
Photomasks , OPC , Lithography Simulation
Websites:
Publications (77)

Proceedings Article | 13 October 2020 Presentation + Paper
Proc. SPIE. 11518, Photomask Technology 2020
KEYWORDS: Contamination, Air contamination, Image processing, Inspection, Printing, Wafer inspection, Photomasks, Image classification, Semiconducting wafers, Yield improvement

Proceedings Article | 16 October 2019 Presentation + Paper
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Lithography, Data modeling, Opacity, Calibration, Etching, Manufacturing, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 3 October 2019 Paper
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Lithography, Data modeling, Waveguides, Data processing, Neural networks, Photomasks, Machine learning, Computational lithography, Optical proximity correction, Vestigial sideband modulation

Proceedings Article | 26 September 2019 Paper
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Scattering, Calibration, Etching, Control systems, Photomasks, Semiconductor manufacturing, Critical dimension metrology, Photoresist processing, Model-based design, Process modeling

Proceedings Article | 29 August 2019 Paper
Proc. SPIE. 11177, 35th European Mask and Lithography Conference (EMLC 2019)
KEYWORDS: Electron beam lithography, Photomasks, Mask making

Showing 5 of 77 publications
Proceedings Volume Editor (2)

SPIE Conference Volume | 5 December 2017

SPIE Conference Volume | 8 December 2016

Conference Committee Involvement (15)
Photomask Technology
26 September 2021 | Monterey, California, United States
Photomask Technology
21 September 2020 | Online Only, California, United States
Photomask Technology
16 September 2019 | Monterey, California, United States
Photomask Technology
17 September 2018 | Monterey, California, United States
Photomask Technology
11 September 2017 | Monterey, California, United States
Showing 5 of 15 Conference Committees
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