Dr. Peter Dürr
senior scientist at Fraunhofer-Institut fuer Photonische Mikrosysteme
SPIE Involvement:
Author
Area of Expertise:
micro optics , spatial light modulators
Websites:
Publications (18)

Proceedings Article | 28 February 2020 Paper
Proc. SPIE. 11293, MOEMS and Miniaturized Systems XIX
KEYWORDS: Actuators, Mirrors, Optical lithography, Calibration, Micromirrors, CMOS technology, Analog electronics

Proceedings Article | 4 March 2019 Paper
Proc. SPIE. 10931, MOEMS and Miniaturized Systems XVIII
KEYWORDS: Microelectromechanical systems, Actuators, Diffractive optical elements, Modulation, Electrodes, Computer generated holography, Spatial light modulators, Finite element methods, Micromirrors

Proceedings Article | 7 March 2014 Paper
Proc. SPIE. 8977, MOEMS and Miniaturized Systems XIII
KEYWORDS: Mirrors, Modulation, Silica, Imaging systems, Electrodes, Copper, Laser processing, Laser applications, Semiconductor lasers, Spatial light modulators

Proceedings Article | 5 February 2010 Paper
Proc. SPIE. 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
KEYWORDS: Mirrors, Microsystems, Calibration, Resistance, Microopto electromechanical systems, Micromirrors, Convection, Resistors, Temperature metrology, Photonic microstructures

Proceedings Article | 19 February 2009 Paper
Proc. SPIE. 7208, MOEMS and Miniaturized Systems VIII
KEYWORDS: Actuators, Mirrors, Optical lithography, Deep ultraviolet, Electrodes, Dielectrics, Spatial light modulators, Micromirrors, Aluminum, Laser systems engineering

Showing 5 of 18 publications
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