Dr. Peter A. Rosenthal Profile

Dr. Peter A. Rosenthal

at Coherent

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 2 June 2003 Paper

FTIR based nondestructive method for metrology of depths in poly silicon-filled trenches

Shoaib Zaidi, George Stojakovic, Alois Gutmann, Cornel Bozdog, Ulrich Mantz, Sylvie Bosch Charpenay, Peter Rosenthal

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.484998

KEYWORDS: FT-IR spectroscopy, Semiconducting wafers, Metrology, Scanning electron microscopy, Etching, Nondestructive evaluation, Silicon, Reflectivity, Infrared radiation, Transistors

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Proceedings Article | 11 October 2000 Paper

Characterization of Si-on-insulator buried layers by FTIR and scatterometry

Victor Yakovlev, Sylvie Bosch-Charpenay, Peter Rosenthal, Peter Solomon, Jiazhan Xu, John Stover, Maria Anc, Michael Alles

Proceedings Volume 4103, (2000) https://doi.org/10.1117/12.403575

KEYWORDS: Semiconducting wafers, Reflectivity, Silicon, Light scattering, FT-IR spectroscopy, Scattering, Interfaces, Oxides, Scatterometry, Oxygen

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Proceedings Article | 8 October 1998 Paper

FTIR reflectance characterization of SIMOX buried oxide layers

Victor Yakovlev, Sylvie Bosch-Charpenay, Peter Rosenthal, Peter Solomon, Jiazhan Xu

Proceedings Volume 3425, (1998) https://doi.org/10.1117/12.326654

KEYWORDS: Semiconducting wafers, FT-IR spectroscopy, Silicon, Reflectivity, Oxygen, Spectroscopy, Process control, Oxides, Sensors, Reflection

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Proceedings Article | 27 August 1998 Paper

Compact FTIR wafer-state sensors: a new way of in-line ULSI characterization

Victor Yakovlev, Sylvie Bosch-Charpenay, Matthew Richter, Peter Rosenthal, Peter Solomon, Jiazhan Xu

Proceedings Volume 3509, (1998) https://doi.org/10.1117/12.324422

KEYWORDS: FT-IR spectroscopy, Sensors, Process control, Semiconductors, Metrology, Spectroscopy, Spectrometers, Reflectance spectroscopy, Doping, Dielectrics

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Proceedings Article | 19 January 1995 Paper

FTIR process monitoring of metal powder temperature and size distribution

Peter Rosenthal, Joseph Cosgrove, John Haigis, James Markham, Peter Solomon, Stuart Farquharson, Philip Morrison, Stephen Ridder, Francis Biancaniello

Proceedings Volume 2367, (1995) https://doi.org/10.1117/12.199665

KEYWORDS: Particles, Metals, Temperature metrology, Scattering, Reflectivity, Infrared radiation, Sensors, Absorption, Atmospheric particles, Laser scattering

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