Dr. Peter Weissbrodt
Vice President Microoptics at JENOPTIK Optical Systems GmbH
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 6 February 2008 Paper
Proc. SPIE. 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics
KEYWORDS: Etching, Diffusers, Binary data, Microlens array, Semiconducting wafers, Calcium, Photoresist materials, Ions, Photomasks, Optics manufacturing

Proceedings Article | 7 March 2007 Paper
Proc. SPIE. 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
KEYWORDS: Optics manufacturing, Optical components, Optical lithography, Near field optics, Micro optics, Manufacturing, Chemical elements, Lithography, Electron beam lithography, Photomasks

Proceedings Article | 15 October 2005 Paper
Proc. SPIE. 5962, Optical Design and Engineering II
KEYWORDS: Beam shaping, Polarization, Optical components, Near field optics, Polarizers, Optical testing, Near field, Lithographic illumination, Silica, Binary data

Proceedings Article | 12 May 2005 Paper
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Polarization, Diffraction gratings, Dielectric polarization, Diffraction, Multiplexing, Optical properties, Deep ultraviolet, Optical design, Chemical elements, Binary data

Proceedings Article | 12 May 2005 Paper
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Diffractive optical elements, Beam shaping, Near field, Lithographic illumination, Silica, Optical alignment, Diffraction, Inspection, Lithography, Control systems

Showing 5 of 18 publications
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