Mr. Petr I. Lazarenko Profile

Petr I. Lazarenko

at MIET

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Author

Publications (3)

Proceedings Article | 30 December 2016 Paper

Investigation of the reactive ion etching of Ge2Sb2Te5 thin films

A. Shulyatev, A. Sherchenkov, D. Gromov, P. Lazarenko, A. Sysa, A. Kozmin

Proceedings Volume 10224, 102241Y (2016) https://doi.org/10.1117/12.2267138

KEYWORDS: Etching, Thin films, Reactive ion etching, Tellurium, Atomic force microscopy, Germanium, Antimony, Argon, Scanning electron microscopy, Surface roughness

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Proceedings Article | 30 December 2016 Paper

Chemical surface treatment of Ge2Sb2Te5 thin films for phase change memory application

M. Mikhailova, S. Nemtseva, V. Glukhenkaya, P. Lazarenko, A. Sherchenkov, S. Kozyukhin, S. Timoshenkov

Proceedings Volume 10224, 102240F (2016) https://doi.org/10.1117/12.2267157

KEYWORDS: Thin films, Etching, Antimony, Tellurium, Germanium, Oxides, Electrodes, Atomic force microscopy, Chemical elements, Microelectronics

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Proceedings Article | 18 December 2014 Paper

Investigation of transport mechanisms in Bi doped Ge2Sb2Te5 thin films for phase change memory application

Petr Lazarenko, Alexey Sherchenkov, Sergey Kozyukhin, Maxim Shtern, Sergey Timoshenkov, Dmitry Gromov, Evgeniy Redichev

Proceedings Volume 9440, 944006 (2014) https://doi.org/10.1117/12.2180999

KEYWORDS: Bismuth, Thin films, Doping, Semiconductors, Chalcogenides, Dielectrics, Antimony, Germanium, Aluminum, Electrodes

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