Dr. Philip R. Bingham Profile

Dr. Philip R. Bingham

at Oak Ridge National Lab

SPIE Involvement:

Editor | Author

Proceedings Article | 7 March 2014 Paper

Magnified neutron radiography with coded sources

Philip Bingham, Hector Santos-Villalobos, Nickolay Lavrik, Hassina Bilheux, Jens Gregor

Proceedings Volume 9020, 90200A (2014) https://doi.org/10.1117/12.2044587

KEYWORDS: Imaging systems, Sensors, Radiography, Image resolution, Reconstruction algorithms, Photomasks, Coded apertures, Gadolinium, Manufacturing, Algorithm development

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Proceedings Article | 6 March 2013 Paper

Neutron imaging for geothermal energy systems

Philip Bingham, Yarom Polsky, Lawrence Anovitz

Proceedings Volume 8661, 86610K (2013) https://doi.org/10.1117/12.2004617

KEYWORDS: Imaging systems, Radiography, Geothermal energy, Water, Sensors, Scintillators, Signal attenuation, X-rays, Image resolution, Digital filtering

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Proceedings Article | 14 February 2013 Paper

Neutron imaging with coded sources: design pitfalls and the implementation of a simultaneous iterative reconstruction technique

Hector Santos-Villalobos, Philip Bingham, Jens Gregor

Proceedings Volume 8657, 865708 (2013) https://doi.org/10.1117/12.2008687

KEYWORDS: Sensors, Reconstruction algorithms, Coded apertures, Imaging systems, Transparency, Photomasks, Radiography, Image resolution, Modulation transfer functions, Image quality

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Proceedings Article | 10 February 2012 Paper

Non-uniform contrast and noise correction for coded source neutron imaging

Hector Santos-Villalobos, Philip Bingham

Proceedings Volume 8296, 82960P (2012) https://doi.org/10.1117/12.913150

KEYWORDS: Radiography, Reconstruction algorithms, Imaging systems, Sensors, Interference (communication), Image resolution, Cameras, Gamma radiation, Coded apertures, CCD image sensors

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Proceedings Article | 7 February 2011 Paper

Coded source neutron imaging

Philip Bingham, Hector Santos-Villalobos, Ken Tobin

Proceedings Volume 7877, 78770M (2011) https://doi.org/10.1117/12.876812

KEYWORDS: Imaging systems, Modulation transfer functions, Sensors, Radiography, Image resolution, Coded aperture imaging, Coded apertures, Scintillators, Charge-coupled devices, Optical simulations

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Proceedings Article | 7 February 2011 Paper

Automatic firearm class identification from cartridge cases

Sridharan Kamalakannan, Christopher Mann, Philip Bingham, Thomas Karnowski, Shaun Gleason

Proceedings Volume 7877, 78770P (2011) https://doi.org/10.1117/12.872414

KEYWORDS: Firearms, Image segmentation, Machine vision, Visual process modeling, Head, Statistical modeling, Scene classification, Interferometers, Image processing, Hough transforms

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SPIE Journal Paper | 1 July 2010

Projection registration applied to nondestructive testing

Philip Bingham, Lloyd Arrowood

JEI, Vol. 19, Issue 3, 031208, (July 2010) https://doi.org/10.1117/12.10.1117/1.3489122

KEYWORDS: Nondestructive evaluation, X-ray computed tomography, Computer simulations, Signal to noise ratio, Image registration, X-rays, Computed tomography, Reconstruction algorithms, Optical alignment, Phase matching

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Proceedings Article | 29 May 2007 Paper

Optical spatial heterodyned interferometry for inspection of microelectromechanical systems

Kenneth Tobin, Philip Bingham, Jeffery Price

Proceedings Volume 6356, 63560G (2007) https://doi.org/10.1117/12.736740

KEYWORDS: Inspection, Microelectromechanical systems, Wavefronts, Interferometry, Photomasks, Semiconductors, Metrology, Semiconducting wafers, Holograms, Phase measurement

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Proceedings Article | 9 June 2006 Paper

Optical spatial heterodyned interferometry for applications in semiconductor inspection and metrology

Kenneth Tobin, Philip Bingham

Proceedings Volume 6162, 616203 (2006) https://doi.org/10.1117/12.674946

KEYWORDS: Photomasks, Inspection, Metrology, Wavefronts, Semiconducting wafers, Phase shifts, Microelectromechanical systems, Phase measurement, Interferometry, Reflectivity

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Proceedings Article | 2 August 2004 Paper

Spatial heterodyne interferometry techniques and applications in semiconductor wafer manufacturing

Philip Bingham, Kenneth Tobin, Gregory Hanson, John Simpson

Proceedings Volume 5531, (2004) https://doi.org/10.1117/12.560423

KEYWORDS: Photomasks, Semiconducting wafers, Inspection, Wavefronts, Phase shifts, Metrology, Phase measurement, Defect detection, Phase shifting, Reflectivity

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SPIE Journal Paper | 1 July 2004

Semiconductor sidewall shape estimation

Philip Bingham, Jeffery Price, Kenneth Tobin, Thomas Karnowski

JEI, Vol. 13, Issue 03, (July 2004) https://doi.org/10.1117/12.10.1117/1.1763586

KEYWORDS: Feature extraction, Scanning electron microscopy, Principal component analysis, Image processing, Databases, Semiconductors, Semiconducting wafers, Error analysis, Imaging systems, Process control

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Proceedings Article | 24 May 2004 Paper

Phase defect detection with spatial heterodyne interferometry

Philip Bingham, Kenneth Tobin, Marylyn Bennett, Pat Marmillion

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.536765

KEYWORDS: Phase shifts, Defect detection, Photomasks, Wavefronts, Reflectivity, Phase measurement, Inspection, Heterodyning, Interferometry, Imaging systems

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Proceedings Article | 17 December 2003 Paper

Preliminary results for mask metrology using spatial heterodyne interferometry

Philip Bingham, Kenneth Tobin, Marylyn Bennett, Pat Marmillion

Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.518364

KEYWORDS: Photomasks, Metrology, Phase measurement, Phase shifts, Inspection, Wavefronts, Phase shifting, Refraction, Semiconducting wafers, Quartz

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Proceedings Article | 15 July 2003 Paper

Sidewall structure estimation from CD-SEM for lithographic process control

Philip Bingham, Jeffery Price, Kenneth Tobin, Thomas Karnowski, Marylyn Bennett, E. Hal Bogardus, Michael Bishop

Proceedings Volume 5041, (2003) https://doi.org/10.1117/12.485229

KEYWORDS: Scanning electron microscopy, Finite element methods, Feature extraction, Databases, Semiconducting wafers, Critical dimension metrology, Sensors, Lithography, Image retrieval, Electron beams

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Proceedings Article | 22 May 2003 Paper

Estimating cross-section semiconductor structure by comparing top-down SEM images

Jeffery Price, Philip Bingham, Kenneth Tobin, Thomas Karnowski

Proceedings Volume 5011, (2003) https://doi.org/10.1117/12.479691

KEYWORDS: Semiconductors, Scanning electron microscopy, Principal component analysis, Feature extraction, Databases, Image processing, Lithography, Electron microscopes, Statistical analysis, Pattern recognition

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Proceedings Article | 1 May 2003 Paper

Semiconductor sidewall shape estimation using top-down CD-SEM image retrieval

Jeffery Price, Philip Bingham, Kenneth Tobin, Thomas Karnowski

Proceedings Volume 5132, (2003) https://doi.org/10.1117/12.514963

KEYWORDS: Antimony, Feature extraction, Semiconductors, Principal component analysis, Image retrieval, Scanning electron microscopy, Databases, Image processing, Image analysis, Algorithm development

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Proceedings Article | 1 May 2003 Paper

Detection of cavitation pits on steel surfaces using SEM imagery

Jeffery Price, Kathy Hylton, Kenneth Tobin, Philip Bingham, John Hunn, John Haines

Proceedings Volume 5132, (2003) https://doi.org/10.1117/12.515154

KEYWORDS: Scanning electron microscopy, Image processing, Sensors, Cavitation, Fourier transforms, Mercury, Image resolution, Liquids, Gaussian filters, Image storage

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Proceedings Article | 12 July 2002 Paper

Direct to digital holography for semiconductor wafer defect detection and review

C. Thomas, Tracy Bahm, Larry Baylor, Philip Bingham, Steven Burns, Matt Chidley, Long Dai, Robert Delahanty, Christopher Doti, Ayman El-Khashab, Robert Fisher, Judd Gilbert, James Goddard, Gregory Hanson, Joel Hickson, Martin Hunt, Kathy Hylton, George John, Michael Jones, Ken Macdonald, Michael Mayo, Ian McMackin, Dave Patek, John Price, David Rasmussen, Louis Schaefer, Thomas Scheidt, Mark Schulze, Philip Schumaker, Bichuan Shen, Randall Smith, Allen Su, Kenneth Tobin, William Usry, Edgar Voelkl, Karsten Weber, Paul Jones, Robert Owen

Proceedings Volume 4692, (2002) https://doi.org/10.1117/12.475659

KEYWORDS: Holograms, Digital holography, Holography, Semiconducting wafers, Cameras, Deep ultraviolet, Spatial frequencies, Beam splitters, Digital video recorders, Fourier transforms

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