Mr. Philip Coane Profile

Philip Coane

Associate Director IFM Operations at Louisiana Tech University

SPIE Involvement:

Author

Publications (8)

Proceedings Article | 22 January 2005 Paper

Fluid-actuated variable focal length polymer microlens system

Mangilal Agarwal, R. Gunasekaran, Philip Coane, Kody Varahramyan

Proceedings Volume 5721, (2005) https://doi.org/10.1117/12.591194

KEYWORDS: Microlens, Polymers, Dynamical systems, Microfluidics, Fluid dynamics, Imaging systems, Optical fabrication, Microopto electromechanical systems, Optical testing, Optical imaging

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Proceedings Article | 18 August 2000 Paper

Silica-like microstructures by x-ray irradiation of polymethylsilsesquioxane spin-on glass films

Vijay-Anandh Shanmugam, Michael Vasile, Philip Coane

Proceedings Volume 4179, (2000) https://doi.org/10.1117/12.395695

KEYWORDS: X-rays, Silicon, Silica, Glasses, Photoresist processing, Silicon films, Sol-gels, Polymethylmethacrylate, Semiconducting wafers, X-ray lithography

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Proceedings Article | 11 August 2000 Paper

Fabrication of graphite masks for deep and ultradeep x-ray lithography

Yohannes Desta, Georg Aigeldinger, Kevin Zanca, Philip Coane, Jost Goettert, Michael Murphy

Proceedings Volume 4175, (2000) https://doi.org/10.1117/12.395599

KEYWORDS: Photomasks, X-rays, Gold, X-ray lithography, Polymethylmethacrylate, Optical lithography, Silicon, Photoresist processing, Titanium, Nickel

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Proceedings Article | 10 April 2000 Paper

Preliminary results at the ultradeep x-ray lithography beamline at CAMD

Georg Aigeldinger, Philip Coane, Benjamin Craft, Jost Goettert, Sam Ledger, Zhong Ling, Harish Manohara, Louis Rupp

Proceedings Volume 4019, (2000) https://doi.org/10.1117/12.382294

KEYWORDS: Photomasks, Polymethylmethacrylate, X-ray lithography, X-rays, Gold, Beryllium, Optical filters, Scanning electron microscopy, Teeth, Microfabrication

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Proceedings Article | 3 September 1999 Paper

Method for planarizing rigid graphite for use as an x-ray mask substrate

Philip Coane, Robert Giasolli, Olga Vladimirsky, Yuli Vladimirsky

Proceedings Volume 3875, (1999) https://doi.org/10.1117/12.360465

KEYWORDS: X-rays, Photomasks, Surface finishing, X-ray lithography, Surface roughness, Polishing, Gold, Radium, Micromachining, Electroplating

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Proceedings Article | 13 September 1996 Paper

Fabrication of composite x-ray masks by micromilling

Philip Coane, Craig Friedrich

Proceedings Volume 2880, (1996) https://doi.org/10.1117/12.250944

KEYWORDS: X-rays, Photomasks, Aluminum, Micro cutting, Gold, Composites, Polymethylmethacrylate, Signal attenuation, Tungsten, Tantalum

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Proceedings Article | 24 June 1993 Paper

Mixed e-beam/optical lithography process for the fabrication of sub-0.25-um poly gates

Keith Kwietniak, Michael Rosenfield, Philip Coane, Christopher Blair, David Klaus

Proceedings Volume 1924, (1993) https://doi.org/10.1117/12.146522

KEYWORDS: Scanning electron microscopy, Metrology, Semiconducting wafers, Etching, Photomicroscopy, Lithography, Electron beam lithography, Photoresist processing, Electron beams, Calibration

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Proceedings Article | 24 June 1993 Paper

Fully-scaled 0.25-micron bipolar technology using variable shaped electron-beam lithography

Philip Coane, Kaolin Chiong, Mary Rothwell, James Warnock, John Cressler, Fritz Hohn, Michael Thomson

Proceedings Volume 1924, (1993) https://doi.org/10.1117/12.146502

KEYWORDS: Lithography, Overlay metrology, Electron beam lithography, Photoresist processing, Metals, Reactive ion etching, Photomasks, Etching, Transistors, Silicon

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