Philip Coane
Associate Director IFM Operations at Louisiana Tech University
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 22 January 2005 Paper
Proc. SPIE. 5721, MOEMS Display and Imaging Systems III
KEYWORDS: Optical imaging, Microfluidics, Imaging systems, Polymers, Optical fabrication, Optical testing, Microopto electromechanical systems, Microlens, Dynamical systems, Fluid dynamics

Proceedings Article | 18 August 2000 Paper
Proc. SPIE. 4179, Micromachining Technology for Micro-Optics
KEYWORDS: Polymethylmethacrylate, Silica, Glasses, X-rays, Silicon, Silicon films, Sol-gels, Photoresist processing, Semiconducting wafers, X-ray lithography

Proceedings Article | 11 August 2000 Paper
Proc. SPIE. 4175, Materials and Device Characterization in Micromachining III
KEYWORDS: Gold, Titanium, Optical lithography, Polymethylmethacrylate, X-rays, Nickel, Silicon, Photomasks, Photoresist processing, X-ray lithography

Proceedings Article | 10 April 2000 Paper
Proc. SPIE. 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS
KEYWORDS: Gold, Optical filters, Polymethylmethacrylate, Teeth, X-rays, Scanning electron microscopy, Photomasks, Microfabrication, Beryllium, X-ray lithography

Proceedings Article | 3 September 1999 Paper
Proc. SPIE. 3875, Materials and Device Characterization in Micromachining II
KEYWORDS: Gold, Polishing, X-rays, Surface roughness, Photomasks, Micromachining, Radium, Electroplating, X-ray lithography, Surface finishing

Showing 5 of 8 publications
Proceedings Volume Editor (1)

SPIE Conference Volume | 11 August 2000

Conference Committee Involvement (3)
Reliability, Testing, and Characterization of MEMS/MOEMS II
27 January 2003 | San Jose, CA, United States
Materials and Device Characterization in Micromachining III
18 September 2000 | Santa Clara, CA, United States
Micromachining and Microfabrication
30 March 1999 | Paris, France
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