Dr. Philippe Hurat
Product Management Director at Cadence Design Systems Inc
SPIE Involvement:
Author
Publications (36)

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Metals, Silicon, Manufacturing, Reliability, Design for manufacturing, Extreme ultraviolet lithography, Optical proximity correction, Semiconducting wafers, Yield improvement, Chemical mechanical planarization

Proceedings Article | 4 April 2019 Presentation + Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Optical lithography, Metals, Manufacturing, Extreme ultraviolet, CMOS technology, Extreme ultraviolet lithography, Double patterning technology, Computer aided design, Resolution enhancement technologies

Proceedings Article | 20 March 2018 Paper
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Metrology, Inspection, Profiling, Photomasks, Image classification, Optical proximity correction, Algorithm development, Standards development, Resolution enhancement technologies, Classification systems

Proceedings Article | 20 March 2018 Paper
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Multilayers, Databases, Error analysis, Silicon, Legal, Optical proximity correction, Tolerancing, Integrated circuit design, System on a chip, Intellectual property

Proceedings Article | 20 March 2018 Paper
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Mathematical modeling, Electronics, Integrated optics, Integrated circuits, Semiconductor manufacturing, Optical proximity correction, Integrated circuit design, Optics manufacturing, Design for manufacturability

Showing 5 of 36 publications
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