Dr. Pierre M. Fanton
at STMicroelectronics
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 28 March 2017 Paper
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Lithography, Electron beam lithography, Metrology, Optical lithography, Scanners, Inspection, Scanning electron microscopy, Finite element methods, Computational lithography, Semiconducting wafers

Proceedings Article | 28 March 2017 Paper
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Lithography, Metrology, Etching, Metals, Image processing, Copper, Manufacturing, Inspection, Scanning electron microscopy, Process control, Optical alignment, Semiconducting wafers, Process engineering, Chemical mechanical planarization

Proceedings Article | 24 March 2016 Paper
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Optical lithography, Calibration, Etching, Metals, Image processing, Reliability, 3D modeling, Scanning electron microscopy, 3D metrology, Photomasks, Artificial intelligence, Optical proximity correction, Critical dimension metrology, Evolutionary algorithms

Proceedings Article | 8 March 2016 Paper
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Lithography, Metrology, Optical lithography, Defect detection, Etching, Metals, Image processing, Scanners, 3D modeling, Scanning electron microscopy, Data processing, Process control, Finite element methods, Photomasks, Computational lithography, Semiconducting wafers

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top