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Ping Yang
at Univ of Tokyo
SPIE Involvement:
Author
Area of Expertise:
Micro-CMM , Calibration , Multi-probe method , Metrology , Laser interferometer , Profile measurement
Publications (1)
Proceedings Article | 14 September 2011 Paper
Multi-probe system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy on a high-precision micro-coordinate measuring machine
Proceedings Volume 8133, 81330T (2011) https://doi.org/10.1117/12.892385
KEYWORDS: Mirrors, Interferometers, Autocollimators, Laser stabilization, Sensors, Laser systems engineering, Motion measurement, Beam splitters, Receivers, Lasers
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