Prof. Piotr B. Grabiec
Head of Electron Technology at Institute of Electron Technology
SPIE Involvement:
Author
Publications (40)

Proceedings Article | 10 November 2016 Paper
Proc. SPIE. 10161, 14th International Conference on Optical and Electronic Sensors
KEYWORDS: Atomic force microscopy, Dielectrics, Silicon, Manufacturing, Silica, Finite element methods, Etching, Sensors, Optics manufacturing, Deep reactive ion etching

Proceedings Article | 10 November 2016 Paper
Proc. SPIE. 10161, 14th International Conference on Optical and Electronic Sensors
KEYWORDS: Microfluidics, Fabrication, Polymers, Lithography, Photoresist materials, 3D modeling, Silicon, Optical lithography, Process modeling, Polymethylmethacrylate

Proceedings Article | 10 November 2016 Paper
Proc. SPIE. 10161, 14th International Conference on Optical and Electronic Sensors
KEYWORDS: Sensors, Semiconducting wafers, Electrodes, Silicon, Skin, Glasses, Thin films, Gold, Electroluminescence, Wet etching

Proceedings Article | 10 November 2016 Paper
Proc. SPIE. 10161, 14th International Conference on Optical and Electronic Sensors
KEYWORDS: Deposition processes, Gold, Silicon, Sensors, Calibration, Electrodes, Profilometers, Platinum, Velocity measurements, Metals

Proceedings Article | 10 November 2016 Paper
Proc. SPIE. 10161, 14th International Conference on Optical and Electronic Sensors
KEYWORDS: Sensors, Microopto electromechanical systems, Micromirrors, Calibration, Electronics, Head, Laser sources, System integration, Signal to noise ratio, Data acquisition

Showing 5 of 40 publications
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