Adaptive optics (AO) is a technology which improves the performance of optical systems by reducing the effects of
rapidly changing optical distortion. Wave front active control by combining wave front sensor and MEMS deformable
mirrors which made of polyimide thin film actuated by electrostatic force is one possible solution. Wave front sensor
detects the image and aberration could be described with Zernike polynomials, and the distorted wave-front is corrected
by deformable mirror. Combining these two technologies, we fabricate a large-scale MEMS deformable mirror with a
20mm diameter circular opening and 67 hexagonal actuation electrodes in this thesis. Moreover, we use commercial
software, Ansys, to simulate the deformation behavior of the membrane with different electrodes applied and give some
device parameter tuning for versatile application. We measure the maximum stoke is 39 um as 195 volts applied to 67
electrodes. Due to the large-scale of our thin membrane, resonant frequency is around 8 Hz. Besides, we also discuss
some possible ways to improve device characteristics and we think deformable mirror has a good potential for wave
front active control based on our experiment results.
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