This paper discusses modeling, design, fabrication and characterization of an optical scanner based on cantilever-type
electrostatic zipping actuators. The electrostatic actuator has been designed to achieve high displacements for large
optical scanning angles at lower actuation voltages. The zipping actuators are fabricated using multi-layer polysilicon
foundry fabrication processes. The electrostatic force between the cantilever and the bottom electrode on the substrate
pulls the cantilever down. With a warped cantilever, the force closes the gap from the anchored end and gradually the
zipping effect actuates the entire cantilever. In our design, mechanical structures are arranged to avoid electrical shortcircuit.
With various annealing temperatures, the warped angles are controllable. The cantilever serves as a reflective
surface and the high out-of-plane displacement is used to steer a reflected laser beam for imaging and scanning
applications. In this paper we present the design considerations in electrostatic zipping actuator displacement and
control as well as the arrangement for optical scanning.
This paper presents the design, fabrication and testing of a fiber optic switch actuated electromagnetically. The
ferromagnetic gel coated optical fiber is actuated using external electromagnetic fields. The ferromagnetic gel consists of
ferromagnetic powders dispersed in epoxy. The fabrication utilizes a simple cost-effective coating setup. A direct
fiberto-fiber alignment eliminates the need for complementary optical parts and the displacement of fiber switches the laser
coupling. The magnetic characteristics of magnetized ferromagnetic materials are performed using alternating gradient
magnetometer and the magnetic hysteresis curves are measured for different ferromagnetic materials including iron,
cobalt, and nickel. Optical fiber switches with various fiber lengths are actuated and their static and dynamic responses
for the same volume of ferromagnetic gel are summarized. The highest displacement is 1.345 mm with an input current
of 260mA. In this paper, the performance of fiber switches with various coating materials is presented.
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