Dr. Qiang Song Profile

Dr. Qiang Song

at Shanghai Institute of Optics and Fine Mechanics

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Publications (2)

SPIE Journal Paper | 13 April 2015

Fabrication error analysis for diffractive optical elements used in a lithography illumination system

Jian Wang, Fang Zhang, Qiang Song, Aijun Zeng, Jing Zhu, Huijie Huang

OE, Vol. 54, Issue 04, 045102, (April 2015) https://doi.org/10.1117/12.10.1117/1.OE.54.4.045102

KEYWORDS: Diffractive optical elements, Diffraction, Photomasks, Error analysis, Etching, Lithographic illumination, Lithography, Device simulation, Optical lithography, Tolerancing

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Proceedings Article | 5 November 2014 Open Access

A simple method generating first-order optical structure based on particle swarm algorithm (withdrawal notice)

Xiangbo Lv, Qiang Song, Rui Wei Yue, Fang Zhang, Jing Zhu, Huijie Huang

Proceedings Volume 9272, 92720L (2014) https://doi.org/10.1117/12.2069385

KEYWORDS: Optical design, Particles, Optical components, Lens design, Head-mounted displays, Zemax, Prototyping, Ray tracing, Distortion, Particle swarm optimization

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