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Qiang Xu
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Publications (1)
Proceedings Article | 18 February 2009 Paper
Capillary Z-pinch discharge produced plasma EUV source
Yongpeng Zhao, Qiang Xu, Xingqiang Zhang
Proceedings Volume 7276, 72761J (2009) https://doi.org/10.1117/12.823433
KEYWORDS: Capillaries, Extreme ultraviolet, Plasma, Electrodes, Extreme ultraviolet lithography, Resistance, Semiconductor manufacturing, Semiconductors, Tin, Switches
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