Qin Chao
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 5 March 2021 Presentation + Paper
Proceedings Volume 11697, 116970M (2021) https://doi.org/10.1117/12.2581358
KEYWORDS: Photonic crystals, Industrial chemicals, Biological and chemical sensing, Microelectromechanical systems, Mid-IR, Thermal sensing, Silicon, Sensing systems, Optical sensors, Process control

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