Dr. Qingxin Zhang Profile

Dr. Qingxin Zhang

at A*STAR Institute of Microelectronics

SPIE Involvement:

Author

Publications (18)

Proceedings Article | 12 March 2024 Presentation + Paper

High aspect ratio Ge-on-Si waveguide platform for miniaturized mid-infrared applications

Andrew Whye Keong Fong, Rachel Chen Fang Ang, Leh Woon Lim, Lennon Yao Ting Lee, Qingxin Zhang, Doris Keh Ting Ng, Xianshu Luo, Landobasa Y. Tobing

Proceedings Volume 12889, 128890I (2024) https://doi.org/10.1117/12.3000110

KEYWORDS: Waveguides, Silicon, Wave propagation, Germanium, Design, Miniaturization, Photonics, Mid infrared, Integrated optics

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Proceedings Article | 12 March 2024 Presentation + Paper

Scandium-doped aluminum nitride photonic integration platform

Nanxi Li, Wing Wai Chung, Jia Sheng Goh, Yat Fung Tsang, Landobasa Y. Tobing, Chong Pei Ho, Binni Varghese, Leh Woon Lim, Minghua Li, Huamao Lin, Qingxin Zhang, Doris K. Ng, Lennon Y. Lee, Xianshu Luo

Proceedings Volume 12889, 128890D (2024) https://doi.org/10.1117/12.3004598

KEYWORDS: Waveguides, Aluminum nitride, Microrings, Photonic integrated circuits, Microresonators, Scandium, Harmonic generation, Optical properties, Semiconducting wafers, Resonators

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Proceedings Article | 12 March 2024 Presentation + Paper

SF6 mixed in N2 gas sensing responses from CMOS-compatible AlN and ScAlN pyroelectric detectors

Doris K. Ng, Weiguo Chen, Linfang Xu, Harmony J. Lau, Landobasa Y. Tobing, Chong Pei Ho, Wing Wai Chung, Norhanani Jaafar, Hanfeng Fu, Qingxin Zhang

Proceedings Volume 12899, 128990J (2024) https://doi.org/10.1117/12.3002138

KEYWORDS: Pyroelectric detectors, Gas sensors, Sensors, Aluminum nitride, Signal detection, Pyroelectricity, Gases, Mid infrared, CMOS sensors

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Proceedings Article | 11 March 2024 Presentation + Paper

Hydrogen sensor (400 ppm - 1%) based on 20% ScAlN pyroelectric detector for a sustainable society

Doris K. Ng, Weiguo Chen, Huanhuan Wang, Zhonghua Gu, Md Hazwani Khairy Md Husni, Isabel Judith Wee Yi Koh, Linfang Xu, Kristel Pei Xuan Wee, Chong Pei Ho, Jia Sheng Goh, Qingxin Zhang

Proceedings Volume 12885, 128850Z (2024) https://doi.org/10.1117/12.3021874

KEYWORDS: Pyroelectric detectors, Signal detection, Sensors, Gas sensors, Sustainability, Thermal sensing, Hydrogen, Gases, CMOS sensors

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Proceedings Article | 15 March 2023 Presentation + Paper

Low-power contactless button system based on MEMS ScAlN pyroelectric detector

Linfang Xu, Doris K. Ng, Weiguo Chen, Nanxi Li, Chong Pei Ho, Duan Jian Goh, Yao Zhang, Qingxin Zhang, Lennon Y. Lee

Proceedings Volume 12434, 1243405 (2023) https://doi.org/10.1117/12.2648806

KEYWORDS: Pyroelectricity, Pyroelectric detectors, Signal detection, Power consumption, Thermography, Microelectromechanical systems, Infrared imaging, Infrared sensors, Infrared detectors

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Proceedings Article | 15 March 2023 Poster + Paper

An integrated MEMS thermal emitter with piezoelectric actuation

Nanxi Li, Andrew Whye Keong Fong, Huanhuan Wang, Leh Woon Lim, Landobasa Y. Tobing, Yun Da Chua, Linfang Xu, Weiguo Chen, Qingxin Zhang, Hong Cai, Qi Jie Wang, Lennon Yao Ting Lee

Proceedings Volume 12434, 124340T (2023) https://doi.org/10.1117/12.2649536

KEYWORDS: Microelectromechanical systems, Silicon, Fabrication, Aluminum nitride, Molybdenum, Emission spectrum, Silicon nitride, Emission wavelengths, Electrodes, Biological and chemical sensing

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Proceedings Article | 13 March 2023 Presentation + Paper

On-chip CO2 sensor integrated with MEMS emitter and pyroelectric detector

Hong Cai, Md Hazwani Khairy, Rachel Chen Fang Ang, Linfang Xu, Doris Keh Ting Ng, Nanxi Li, Zhonghua Gu, Anmin Kong, Weiguo Chen, Wen Wei Seit, Eva Wai Leong Ching, Norhanani Jaafar, Huanhuan Wang, Landobasa Y. Tobing, Leh Woon Lim, Qingxin Zhang, Lennon Yao Ting Lee

Proceedings Volume 12426, 124260H (2023) https://doi.org/10.1117/12.2650363

KEYWORDS: Sensors, Pyroelectric detectors, Microelectromechanical systems, Gas sensors, Carbon dioxide, Pyroelectricity, CMOS sensors, Temperature metrology, Environmental monitoring

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Proceedings Article | 5 March 2021 Presentation + Paper

Photonic crystal MEMS emitter for chemical gas sensing

Nanxi Li, Qin Chao, Zhonghua Gu, Shiwei Song, Yanyan Zhou, Shaonan Zheng, Linfang Xu, Yun Da Chua, Qingxin Zhang, Hong Cai, Daohua Zhang, Qi Jie Wang, Lennon Lee

Proceedings Volume 11697, 116970M (2021) https://doi.org/10.1117/12.2581358

KEYWORDS: Photonic crystals, Industrial chemicals, Biological and chemical sensing, Microelectromechanical systems, Mid-IR, Thermal sensing, Silicon, Sensing systems, Optical sensors, Process control

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Proceedings Article | 5 March 2021 Presentation + Paper

CMOS compatible MEMS pyroelectric infrared detectors: from AlN to ScAlN

Doris K. Ng, Chong-Pei Ho, Tantan Zhang, Linfang Xu, Li-Yan Siow, Wing-Wai Chung, Hong Cai, Lennon Y. Lee, Qingxin Zhang, Navab Singh

Proceedings Volume 11697, 116970N (2021) https://doi.org/10.1117/12.2582707

KEYWORDS: Infrared sensors, Infrared radiation, Absorption, Thin films, Sensors, Pyroelectric detectors, Infrared detectors, Aluminum nitride, Microelectromechanical systems, Thermography

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Proceedings Article | 19 February 2011 Paper

Silicon photonic integrated circuits: from devices to integration

Tsung-Yang Liow, Qing Fang, Andy Lim, Liang Ding, Qing Xin Zhang, Jing Zhang, Ning Duan, Junfeng Song, Fang-Fang Ren, Hong Cai, Samson Tua Silalahi, Mingbin Yu, Guo-Qiang Lo, Dim-Lee Kwong

Proceedings Volume 7942, 79420E (2011) https://doi.org/10.1117/12.877905

KEYWORDS: Silicon photonics, Germanium, Silicon, Waveguides, Modulators, Photodetectors, Photonic integrated circuits, Integrated circuits, Receivers, Avalanche photodetectors

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Proceedings Article | 8 February 2008 Paper

Development of wafer level packaged scanning micromirrors

Aibin Yu, Chengkuo Lee, Li Ling Yan, Qing Xin Zhang, Seung Uk Yoon, John H. Lau

Proceedings Volume 6887, 688707 (2008) https://doi.org/10.1117/12.762021

KEYWORDS: Semiconducting wafers, Micromirrors, Mirrors, Wafer bonding, Microelectromechanical systems, Packaging, Silver, Interfaces, Actuators, Finite element methods

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Proceedings Article | 8 February 2008 Paper

Taper couplers for coupling between laser and silicon waveguide with large allowable tolerance

Jing Zhang, Bihan Li, Jayakrishnan Chandrappan, Qing Xin Zhang, Pamidighantam Ramana, Patinharekandy Prabhathan, Hon Shing Lau, Dim Lee Kwong, Murukeshan Vadakke Matham

Proceedings Volume 6899, 689909 (2008) https://doi.org/10.1117/12.764254

KEYWORDS: Semiconductor lasers, Waveguides, Silicon, Tolerancing, Waveguide lasers, Light wave propagation, Packaging, Optical benches, Photonics, Assembly tolerances

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Proceedings Article | 12 December 2007 Paper

Design of taper coupler for effective laser and single mode fiber coupling with large tolerance

Jing Zhang, V. Ramana Pamidighantam, John Hon-Shing Lau, Qingxin Zhang, Chandrappan Jayakrishnan, Chee Wei Tan, Ming Chinq Jong, Teo Wei Liang Calvin, Dim Lee Kwong

Proceedings Volume 6782, 67821L (2007) https://doi.org/10.1117/12.746624

KEYWORDS: Semiconductor lasers, Single mode fibers, Tolerancing, Fiber lasers, Silicon, Waveguides, Optical benches, Assembly tolerances, Fiber couplers, Waveguide lasers

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Proceedings Article | 3 October 2003 Paper

MEMS deep-RIE fabrication process and device characterization

Jing Li, Qing Xin Zhang, Anand Krishna Asundi, Ai Qun Liu

Proceedings Volume 5145, (2003) https://doi.org/10.1117/12.500343

KEYWORDS: Etching, Oxides, Silicon, Reactive ion etching, Optical switching, Microelectromechanical systems, Deep reactive ion etching, Semiconducting wafers, Plasma enhanced chemical vapor deposition, Anisotropic etching

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Proceedings Article | 3 September 2002 Paper

Hybrid reconfigurable OADM using MEMS switch and FBG

Jing Li, Ai Liu, Q.X Zhang, N. Balasubramanian, C. Lu

Proceedings Volume 4907, (2002) https://doi.org/10.1117/12.482274

KEYWORDS: Fiber Bragg gratings, Switches, Microelectromechanical systems, Optical switching, Micromirrors, Signal attenuation, Metals, Switching, Silicon, Thermal effects

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Proceedings Article | 19 April 2002 Paper

Application of deep-trench LISA technology on optical switch fabrication

Qingxin Zhang, Jing Li, Yu Bo Miao, Ai Liu

Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462886

KEYWORDS: Etching, Oxides, Metals, Silicon, Nanoimprint lithography, Optical switching, Switches, Photomasks, Mirrors, Optical fabrication

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Proceedings Article | 18 October 2001 Paper

Integrated add/drop multiplexer (ADM) using micromachined mirror

J. Li, Q.X. Zhang, N. Balasubramanian, J.-M. Huang, Ai Liu

Proceedings Volume 4582, (2001) https://doi.org/10.1117/12.445081

KEYWORDS: Micromirrors, Multiplexers, Mirrors, Dry etching, Electrodes, Optical switching, Optical interconnects, Quantum efficiency, Aluminum, Thin film deposition

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Proceedings Article | 18 October 2001 Paper

Micromachined variable optical attenuator (VOA)

J. Li, Xu Zhang, Ai Liu, Q.X Zhang, Ting Mei

Proceedings Volume 4582, (2001) https://doi.org/10.1117/12.445084

KEYWORDS: Micromirrors, Signal attenuation, Variable optical attenuators, Single mode fibers, Deep reactive ion etching, Optical switching, Optical interconnects, Quantum wells, Wavelength division multiplexing, Control systems

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Showing 5 of 18 publications

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