Dr. Qing Xin Zhang
at A*STAR Institute of Microelectronics
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 5 March 2021 Presentation + Paper
Proc. SPIE. 11697, MOEMS and Miniaturized Systems XX
KEYWORDS: Microelectromechanical systems, Infrared detectors, Thermography, Infrared sensors, Thin films, Sensors, Infrared radiation, Aluminum nitride, pyroelectric detectors, Absorption

Proceedings Article | 5 March 2021 Presentation + Paper
Proc. SPIE. 11697, MOEMS and Miniaturized Systems XX
KEYWORDS: Thermal sensing, Microelectromechanical systems, Mid-IR, Optical sensors, Silicon, Photonic crystals, Process control, Sensing systems, Biological and chemical sensing, Industrial chemicals

Proceedings Article | 19 February 2011 Paper
Proc. SPIE. 7942, Optoelectronic Integrated Circuits XIII
KEYWORDS: Photodetectors, Avalanche photodetectors, Waveguides, Germanium, Silicon, Receivers, Modulators, Integrated circuits, Photonic integrated circuits, Silicon photonics

Proceedings Article | 8 February 2008 Paper
Proc. SPIE. 6899, Photonics Packaging, Integration, and Interconnects VIII
KEYWORDS: Packaging, Waveguides, Silicon, Semiconductor lasers, Photonics, Optical benches, Waveguide lasers, Tolerancing, Assembly tolerances, Light wave propagation

Proceedings Article | 8 February 2008 Paper
Proc. SPIE. 6887, MOEMS and Miniaturized Systems VII
KEYWORDS: Microelectromechanical systems, Packaging, Actuators, Mirrors, Interfaces, Silver, Finite element methods, Micromirrors, Semiconducting wafers, Wafer bonding

Showing 5 of 11 publications
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