Mr. Qing Yao Profile

Qing Yao

at Univ of Illinois

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 1 July 2005 Paper

Qing Yao, Placid Ferreira, Deepkishore Mukhopadhyay

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.605632

KEYWORDS: Kinematics, Actuators, Silicon, Semiconducting wafers, Crystals, Metals, Sensors, Silica, Photomasks, Microfabrication

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Keywords/Phrases