Mr. Rafal Rakowski Profile

Rafal Rakowski

at Wojskowa Akademia Techniczna

SPIE Involvement:

Author

Publications (24)

Proceedings Article | 18 May 2009 Paper

Surface changes of solids under intense EUV irradiation using a laser-plasma source

Andrzej Bartnik, Henryk Fiedorowicz, Roman Jarocki, Jerzy Kostecki, Rafal Rakowski, Miroslaw Szczurek

Proceedings Volume 7361, 73610C (2009) https://doi.org/10.1117/12.820744

KEYWORDS: Extreme ultraviolet, Polymers, Plasma, Grazing incidence, Polymethylmethacrylate, Laser ablation, Mirrors, Scanning electron microscopy, Positron emission tomography, Solids

Read Abstract +

Proceedings Article | 20 November 2008 Paper

Design and study of efficiency of EUV condensor for illumination of large samples

L. Sveda, L. Pina, V. Semencova, A. Inneman, A. Bartnik, H. Fiedorowicz, R. Rakowski

Proceedings Volume 7141, 71410P (2008) https://doi.org/10.1117/12.822370

KEYWORDS: Mirrors, Silver, Molybdenum, Manufacturing, Extreme ultraviolet, Lithographic illumination, Sensors, Plasma, Optics manufacturing, Lithography

Read Abstract +

Proceedings Article | 20 November 2008 Paper

Laser plasma sources of soft x-rays and extreme ultraviolet (EUV) for technology, biomedical, and metrology applications

Andrzej Bartnik, Henryk Fiedorowicz, Roman Jarocki, Jerzy Kostecki, Rafał Rakowski, Magdalena Sawicka, Mirosław Szczurek

Proceedings Volume 7141, 714105 (2008) https://doi.org/10.1117/12.822350

KEYWORDS: Extreme ultraviolet, Plasma, Mirrors, Polymers, Grazing incidence, Xenon, Micromachining, X-rays, Argon, Laser applications

Read Abstract +

Proceedings Article | 17 September 2007 Paper

Micro- and nanoprocessing of organic polymers using a compact laser plasma EUV source equipped with EUV optical systems

Henryk Fiedorowicz, Andrzej Bartnik, Krzysztof Jakubczak, Roman Jarocki, Jerzy Kostecki, Ladislav Pina, Rafał Rakowski, Anna Szczurek, Mirosław Szczurek

Proceedings Volume 6703, 67030C (2007) https://doi.org/10.1117/12.735588

KEYWORDS: Extreme ultraviolet, Polymers, Plasma, Mirrors, Laser ablation, Photons, Multilayers, Coating, Nanoprocess, Ultraviolet radiation

Read Abstract +

Proceedings Article | 26 April 2007 Paper

Micro- and nanoprocessing of organic polymers using a laser plasma XUV source

Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Libor Juha, Jerzy Kostecki, Rafal Rakowski, Miroslaw Szczurek

Proceedings Volume 6346, 63461H (2007) https://doi.org/10.1117/12.738157

KEYWORDS: Extreme ultraviolet, Plasma, Polymers, Polymethylmethacrylate, Pulsed laser operation, Xenon, X-rays, Nanoprocess, Nd:YAG lasers, Gas lasers

Read Abstract +

Proceedings Article | 23 January 2007 Paper

Application of laser plasma soft x-ray and EUV sources in micro- and nanotechnology

Henryk Fiedorowicz, Andrzej Bartnik, Krzysztof Jakubczak, Roman Jarocki, Libor Juha, Jerzy Kostecki, Ladislav Pina, Rafał Rakowski, Mirosław Szczurek

Proceedings Volume 6598, 65980G (2007) https://doi.org/10.1117/12.726547

KEYWORDS: Extreme ultraviolet, X-rays, Plasma, Polymers, Polymethylmethacrylate, X-ray sources, Laser ablation, X-ray lasers, Photons, Pulsed laser operation

Read Abstract +

Proceedings Article | 22 April 2006 Paper

Measuring system for radiation pulses from gas-puff laser-plasma source

Zbigniew Bielecki, Janusz Mikołajczyk, Rafał Rakowski, Jacek Wojtas

Proceedings Volume 6189, 618915 (2006) https://doi.org/10.1117/12.663240

KEYWORDS: Extreme ultraviolet, Mirrors, Sensors, Head, Photodiodes, Absorption filters, Optical filters, Signal detection, Xenon, Optoelectronics

Read Abstract +

Proceedings Article | 12 October 2005 Paper

Spectral and spatial measurements of a laser-produced plasma EUV source for 13.5 nm based on a double stream Xe/He gas puff target

R. Rakowski, A. Bartnik, H. Fiedorowicz, R. Jarocki, J. Kostecki, J. Krzywiński, J. Mikołajczyk, L. Ryć, M. Szczurek, P. Wachulak

Proceedings Volume 5958, 59582W (2005) https://doi.org/10.1117/12.622218

KEYWORDS: Plasma, Xenon, Extreme ultraviolet, Pulsed laser operation, Spectrographs, Charge-coupled devices, Nd:YAG lasers, Geographic information systems, Helium, Coded apertures

Read Abstract +

Proceedings Article | 12 October 2005 Paper

Wide band laser-plasma soft x-ray source using a gas puff target for direct photoetching of polymers

Andrzej Bartnik, Henryk Fiedorowicz, Roman Jarocki, Jerzy Kostecki, Rafał Rakowski, Mirosław Szczurek

Proceedings Volume 5958, 595815 (2005) https://doi.org/10.1117/12.622119

KEYWORDS: X-rays, Plasma, Xenon, Polymers, X-ray sources, Polymethylmethacrylate, Krypton, Argon, Micromachining, Laser ablation

Read Abstract +

Proceedings Article | 13 September 2005 Paper

Elongated high-density gas puff target for experiments on laser-driven x-ray lasers

Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Jerzy Kostecki, Rafal Rakowski, Miroslaw Szczurek

Proceedings Volume 5919, 591903 (2005) https://doi.org/10.1117/12.615884

KEYWORDS: X-ray lasers, X-rays, X-ray characterization, Gas lasers, Xenon, Plasma, Solids, Electromagnetism, Optical filters, Optoelectronics

Read Abstract +

Proceedings Article | 31 August 2005 Paper

Compact and debris-free laser plasma soft x-ray source based on a gas puff target

H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, J. Krzywinski, R. Rakowski, M. Szczurek

Proceedings Volume 5918, 59180G (2005) https://doi.org/10.1117/12.615872

KEYWORDS: X-rays, Plasma, X-ray sources, Pulsed laser operation, Xenon, X-ray lasers, Laser applications, Argon, Helium, Electromagnetism

Read Abstract +

Proceedings Article | 27 August 2005 Paper

Micromachining of organic polymers by direct photo-etching using a compact laser plasma soft x-ray source

H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, R. Rakowski, M. Szczurek

Proceedings Volume 5931, 59310H (2005) https://doi.org/10.1117/12.615890

KEYWORDS: X-rays, Plasma, X-ray sources, Polymers, Micromachining, Nd:YAG lasers, Polymethylmethacrylate, Laser ablation, Xenon, Scanning electron microscopy

Read Abstract +

SPIE Journal Paper | 1 July 2005

Short-wavelength ablation of molecular solids: pulse duration and wavelength effects

Libor Juha, Michal Bittner, Dagmar Chvostova, Josef Krasa, Michaela Kozlov, Miroslav Pfeifer, Jiri Polan, Ansgar Präg, Bedrich Rus, Michal Stupka, Josef Feldhaus, Vit Letal, Zdenek Otcenasek, Jacek Krzywinski, Robert Nietubye, Jerzy Pelka, Andrzej Andrejczuk, Ryszard Sobierajski, Leszek Ryc, Frederick Boody, Henryk Fiedorowicz, Andrzej Bartnik, Janusz Mikolajczyk, Rafal Rakowski, Pavel Kubát, Ladislav Pína, Martin Horváth, Michael Grisham, Georgiy Vaschenko, Carmen Menoni, Jorge Rocca

JM3, Vol. 4, Issue 03, 033007, (July 2005) https://doi.org/10.1117/12.10.1117/1.2037467

KEYWORDS: Laser ablation, Polymethylmethacrylate, Extreme ultraviolet, Free electron lasers, Solids, Pulsed laser operation, X-rays, Signal attenuation, Photons, Absorption

Read Abstract +

Proceedings Article | 27 April 2005 Paper

Passively Q-switched nanosecond pulse-train Nd:YAG laser system

Miroslaw Szczurek, Roman Jarocki, Andrzej Bartnik, Henryk Fiedorowicz, Jerzy Kostecki, Rafal Rakowski, Anna Szczurek

Proceedings Volume 5707, (2005) https://doi.org/10.1117/12.589125

KEYWORDS: Pulsed laser operation, Nd:YAG lasers, Oscillators, Laser systems engineering, Q switched lasers, Amplifiers, Laser energy, Q switches, Telescopes, Laser scattering

Read Abstract +

Proceedings Article | 23 March 2005 Paper

Photo-etching of organic polymers using a laser plasma x-ray source based on a gas puff target irradiated with the PALS facility

Henryk Fiedorowicz, Andrzej Bartnik, Michal Bittner, Libor Juha, Josef Krasa, Pavel Kubat, Janusz Mikolajczyk, Rafal Rakowski

Proceedings Volume 5777, (2005) https://doi.org/10.1117/12.611333

KEYWORDS: X-rays, Polymers, Plasma, X-ray sources, Polymethylmethacrylate, Micromachining, Extreme ultraviolet, Aluminum, Synchrotron radiation, Xenon

Read Abstract +

Proceedings Article | 10 November 2004 Paper

Short-wavelength ablation of solids: pulse duration and wavelength effects

Libor Juha, Michal Bittner, Dagmar Chvostova, Vit Letal, Josef Krasa, Zdenek Otcenasek, Michaela Kozlova, Jiri Polan, Ansgar Prag, Bedrich Rus, Michal Stupka, Jacek Krzywinski, Andrzej Andrejczuk, Jerzy Pelka, Ryszard Sobierajski, Leszek Ryc, Josef Feldhaus, Frederick Boody, Henryk Fiedorowicz, Andrzej Bartnik, Janusz Mikolajczyk, Rafal Rakowski, P. Kubat, Ladislav Pina, Michael Grisham, Georgiy Vaschenko, Carmen Menoni, Jorge Rocca

Proceedings Volume 5534, (2004) https://doi.org/10.1117/12.560413

KEYWORDS: Laser ablation, Polymethylmethacrylate, Extreme ultraviolet, Free electron lasers, Pulsed laser operation, Photons, X-rays, Plasma, Signal attenuation, Etching

Read Abstract +

Proceedings Article | 16 June 2003 Paper

Compact laser plasma EUV source based on a gas puff target for metrology

Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Jerzy Kostecki, Janusz Mikolajczyk, Rafal Rakowski, Miroslaw Szczurek

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.482749

KEYWORDS: Extreme ultraviolet, Plasma, Spectrometers, Xenon, X-rays, Pulsed laser operation, Nd:YAG lasers, Photodiodes, Laser metrology, Metrology

Read Abstract +

Proceedings Article | 1 April 2003 Paper

Spectral measurement of soft x-ray and EUV emissions from a laser-irradiated gas puff target using a transmission grating spectrometer

Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Jerzy Kostecki, Jacek Krzywinski, Janusz Mikolajczyk, Rafal Rakowski, Miroslaw Szczurek, Janusz Wawer

Proceedings Volume 5064, (2003) https://doi.org/10.1117/12.501394

KEYWORDS: X-rays, Extreme ultraviolet, Spectroscopy, Laser applications, Pulsed laser operation, Gas lasers, Photoemission spectroscopy, Neodymium glass lasers, Laser development, X-ray sources

Read Abstract +

Proceedings Article | 1 July 2002 Paper

Laser plasma radiation sources based on a laser-irradiated gas puff target for x-ray and EUV lithography technologies

Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Jerzy Kostecki, Rafal Rakowski, Miroslaw Szczurek

Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472337

KEYWORDS: Extreme ultraviolet, X-rays, Plasma, X-ray lithography, Gas lasers, Laser irradiation, Extreme ultraviolet lithography, Laser applications, X-ray technology, Pulsed laser operation

Read Abstract +

Proceedings Article | 12 December 2001 Paper

Demonstration of a neon-like argon x-ray laser using a short-pulse laser-irradiated gas puff target

Henryk Fiedorowicz, Andrzej Bartnik, James Dunn, Jim Hunter, Joseph Nilsen, Albert Osterheld, Rafal Rakowski, Vyacheslav Shlyaptsev, Raymond Smith, Miroslaw Szczurek

Proceedings Volume 4505, (2001) https://doi.org/10.1117/12.450597

KEYWORDS: X-ray lasers, Picosecond phenomena, Plasmas, Argon ion lasers, Argon, Solids, Pulsed laser operation, 3D acquisition, Gas lasers, Ions

Read Abstract +

Proceedings Article | 14 November 2001 Paper

Characterization and optimization of a laser-produced x-ray source with a double-stream gas puff target

Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Jerzy Kostecki, Jacek Krzywinski, Rafal Rakowski, Miroslaw Szczurek

Proceedings Volume 4504, (2001) https://doi.org/10.1117/12.448451

KEYWORDS: X-rays, Extreme ultraviolet, Laser applications, X-ray sources, Photodiodes, Pulsed laser operation, Neodymium glass lasers, Silicon, Laser development, Laser energy

Read Abstract +

Proceedings Article | 20 August 2001 Paper

Characterization of a laser-produced x-ray source with a double-stream gas puff target for x-ray and EUV lithography

Henryk Fiedorowicz, Andrzej Bartnik, Hiroyuki Daido, Roman Jarocki, Rafal Rakowski, Masayuki Suzuki, Miroslaw Szczurek, Susumu Yamagami

Proceedings Volume 4343, (2001) https://doi.org/10.1117/12.436680

KEYWORDS: X-rays, Extreme ultraviolet, Solids, Plasma, Xenon, Argon, X-ray lithography, Laser development, Nd:YAG lasers, Sensors

Read Abstract +

Proceedings Article | 23 April 2001 Paper

Soft x-ray emission from a double-stream gas puff target irradiated by a nanosecond laser pulse

Andrzej Bartnik, Henryk Fiedorowicz, Rafal Rakowski, Miroslaw Szczurek, Fred Bijkerk, R. Bruijn, H. Fledderus

Proceedings Volume 4424, (2001) https://doi.org/10.1117/12.425644

KEYWORDS: Plasma, X-rays, Xenon, Argon, Helium, Pulsed laser operation, Photodiodes, Mirrors, Optical filters, Coded apertures

Read Abstract +

Proceedings Article | 23 November 1999 Paper

Characterization and optimization of a laser-produced x-ray source with a gas puff target

Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Rafal Rakowski, Miroslaw Szczurek, Hiroyuki Daido, Noriyuki Sakaya, Masayuki Suzuki, Hideo Nagatomo, Huajing Tang, Il Choi, Yusuke Tohyama, Susumu Yamagami, Takeyoshi Nakayama

Proceedings Volume 3767, (1999) https://doi.org/10.1117/12.371110

KEYWORDS: X-rays, Xenon, Gas lasers, Plasmas, X-ray imaging, Chlorine, Liquids, Nitrogen, Nd:YAG lasers, Helium

Read Abstract +

Showing 5 of 24 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years