Dr. Rahim Forouhi
President and CEO at n&k Technology Inc
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 22 January 2001 Paper
Proc. SPIE. 4186, 20th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Thin films, Lithography, Refractive index, Metrology, Deep ultraviolet, Interfaces, Reflectivity, Transmittance, Photomasks, Phase shifts

Proceedings Article | 18 August 2000 Paper
Proc. SPIE. 4181, Challenges in Process Integration and Device Technology
KEYWORDS: Oxides, Signal to noise ratio, Crystals, Interfaces, Silicon, Reflectivity, Nondestructive evaluation, Transmission electron microscopy, Time metrology, Semiconducting wafers

Proceedings Article | 21 March 2000 Paper
Proc. SPIE. 3966, Machine Vision Applications in Industrial Inspection VIII
KEYWORDS: Carbon, Thin films, Refractive index, Interfaces, Reflectivity, Magnetism, Atomic force microscopy, Optical testing, Head, Aluminum

Proceedings Article | 30 December 1999 Paper
Proc. SPIE. 3873, 19th Annual Symposium on Photomask Technology
KEYWORDS: Near infrared, Optical properties, Sensors, Reflectivity, Chromium, Solids, Transmittance, Photomasks, Absorbance, Vacuum ultraviolet

Proceedings Article | 8 June 1998 Paper
Proc. SPIE. 3332, Metrology, Inspection, and Process Control for Microlithography XII
KEYWORDS: Thin films, Refractive index, Data modeling, Deep ultraviolet, Interfaces, Silicon, Coating, Reflectivity, Optical testing, Photoresist materials

Showing 5 of 10 publications
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