Rama Puligadda
Executive Director at Brewer Science Inc
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 14 May 2004 Paper
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Lithography, Etching, Polymers, Coating, Reflectivity, Chromophores, Photoresist materials, Absorbance, Prototyping, Bottom antireflective coatings

Proceedings Article | 14 May 2004 Paper
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Etching, Silicon, Resistance, Reflectivity, Electroluminescence, Photoresist materials, Silicon films, Solids, Plasma etching, Plasma

Proceedings Article | 26 June 2003 Paper
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Lithography, Refractive index, Etching, Polymers, Silicon, Coating, Reflectivity, Photoresist processing, Prototyping, Bottom antireflective coatings

Proceedings Article | 26 June 2003 Paper
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Carbon, Thin films, Sensors, Polymers, Molecules, X-rays, Silicon, Chemistry, Chlorine, Liquids

Proceedings Article | 24 July 2002 Paper
Proc. SPIE. 4690, Advances in Resist Technology and Processing XIX
KEYWORDS: Optical lithography, Silica, Optical properties, Etching, Silicon, Chemistry, Reflectivity, Photoresist materials, Refraction, Absorption

Showing 5 of 8 publications
Conference Committee Involvement (2)
Advances in Resist Technology and Processing XXII
28 February 2005 | San Jose, California, United States
Advances in Resist Technology and Processing XXI
23 February 2004 | Santa Clara, California, United States
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