This paper presents the simulation of various electromechanical performance parameters for an efficient and broadband
air coupled Capacitive Micromachined Ultrasonic Transducer (CMUT) for Non Destructive Testing and Evaluation
(NDT/NDE) using FEM simulation tool, Coventor Ware. The non contact ultrasonic inspection performed in ambient air
reduces the complexity and cost. Various critical parameters like collapse voltage, resonant frequency, coupling
coefficient, squeeze film damping, bandwidth, quality factor and transient response of the single cell of CMUT are
discussed. We employ a hexagonal CMUT cell for the modeling to improve the CMUT’s transmission/reception
efficiency as the average membrane displacement is high.
In this paper, a novel MEMS accelerometer based fuel control system for automobile applications has been presented,
primarily to be used in Engine Control Unit (ECU). It consists of a MEMS accelerometer inertial sensor for
acceleration/velocity measurement of automobile followed by a dedicated signal conditioning unit, data converter and
fuel control unit. MEMS accelerometer implemented in this work is an application specific low-g single axis
piezoresistive bulk micromachined device with very low cross-axis sensitivity, and fabricated using post-process CMOS
compatible dual-dope (Silicic acid +Ammonium per Sulphate) TMAH anisotropic etching. Signal conditioning circuit is
a chopper stabilized (CS) low noise amplifier suitable for low frequency low amplitude signal amplification. Data
converter is a low power, 6-bit successive approximation (SAR) ADC. Circuit is designed in 0.18 µm CMOS
technology. PID based control unit, which regulates the duration of fuel injection depending on the driver's request in
real time for optimal efficiency and minimal pollution, has been developed in Simulink module.
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