Dr. Ray Cybulski Profile

Dr. Ray Cybulski

Manager Module Engineering at Cymer LLC

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Publications (2)

Proceedings Article | 7 July 1997 Paper

Reliability studies of 1-kHz KrF excimer lasers for DUV lithography

Palash Das, Hilary Heinmets, Cynthia Maley, Igor Fomenkov, Ray Cybulski, Donald Larson

Proceedings Volume 3051, (1997) https://doi.org/10.1117/12.276049

KEYWORDS: Deep ultraviolet, Lithography, Reliability, Excimer lasers, Laser manufacturing, Manufacturing, Mercury, Lamps, Optics manufacturing

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Proceedings Article | 4 April 1997 Paper

Performance of 1 kHz KrF excimer laser for DUV lithography

Palash Das, Richard Morton, Igor Fomenkov, William Partlo, Richard Sandstrom, Cynthia Maley, Ray Cybulski

Proceedings Volume 3092, (1997) https://doi.org/10.1117/12.270109

KEYWORDS: Deep ultraviolet, Lithography, Excimer lasers, Manufacturing, Reliability, Failure analysis, Semiconducting wafers, Laser scanners, 3D scanning, Pulsed power

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