Dr. Reiner W. E. Wechsung
CEO at Boehringer Ingelheim microParts GmbH
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 29 April 2003 Paper
Proceedings Volume 5118, (2003) https://doi.org/10.1117/12.498719
KEYWORDS: Microsystems, Silicon, Nanotechnology, Telecommunications, Manufacturing, Information technology, Nanolithography, Sensors, High aspect ratio silicon micromachining, Computing systems

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