CONFERENCE PROCEEDINGS
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Renatus Sikorski
at Infineon Technologies AG
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Author
Publications (5)
Proceedings Article | 28 August 2003 Paper
Implementation of SMIF in reticle production for front-end processes: impact on yield
Renatus Sikorski, Annett Graeser
Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504278
KEYWORDS: Particles, Reticles, Yield improvement, Interfaces, Data analysis
Proceedings Article | 16 August 2002 Paper
Defect density engineering for high-end masks (=0.14 technology phase-shift masks)
R Laubmeier, A MacKenzie, M Schmidt, R Sikorski, K Koremura, Takashi Ito
Proceedings Volume 4764, (2002) https://doi.org/10.1117/12.479344
KEYWORDS: Inspection, Etching, Scanning electron microscopy, Photomasks, Laser applications, Particles, Dry etching, Databases, Reticles, Chromium
Proceedings Article | 26 February 2001 Paper
Molding of polymers for chemical sensors: strategies of analyte detection and mixture characterization
Franz Dickert, W. Bulst, Oliver Hayden, Liu Ping, Paul Achatz, Renatus Sikorski, Ulrich Wolff
Proceedings Volume 4205, (2001) https://doi.org/10.1117/12.417471
KEYWORDS: Polymers, Sensors, Molecules, Polyurethane, Luminescence, Polymerization, Chemical analysis, Chemical fiber sensors, Fluorescence spectroscopy, Liquids
Proceedings Article | 18 November 1999 Paper
Self-organized polymers as sensitive coatings
Franz Dickert, Paul Achatz, W. Bulst, Wolfgang Greibl, Oliver Hayden, Liu Ping, Renatus Sikorski, Ulrich Wolff
Proceedings Volume 3857, (1999) https://doi.org/10.1117/12.370278
KEYWORDS: Sensors, Liquid crystals, Dielectrics, Molecules, Chemical analysis, Gold, Quartz, Hydrogen, Self-assembled monolayers, Adsorption
Proceedings Article | 18 December 1998 Paper
Chemical microsensors with molecularly imprinted sensitive layers
Franz Dickert, Wolfgang Greibl, Renatus Sikorski, Matthias Tortschanoff, K. Weber, W. Bulst, G. Fischerauer
Proceedings Volume 3539, (1998) https://doi.org/10.1117/12.333738
KEYWORDS: Sensors, Polymers, Molecules, Chemical analysis, Signal detection, Quartz, Resonators, Polymeric sensors, Transducers, Luminescence
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