Dr. Renyang Meng Profile

Dr. Renyang Meng

Researcher Computational Lithography at imec

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Publications (1)

Proceedings Article | 13 November 2024 Presentation

Monotonic machine learning for lithography retargeting layer generation by leveraging contour-based metrology

Yuansheng Ma, Haizhou Yin, Le Hong, Xuefeng Zeng, Xiaomei Li, Hongming Zhang, Jeongmi Lee, Xiaoyuan Qi, Neal Lafferty, Germain Fenger, George Lippincott, Jiechang Hou, Abdulrazaq Adams, Xima Zhang, Yuyang Sun, Danping Peng, Renyang Meng, Werner Gillijns

Proceedings Volume 13216, 132161V (2024) https://doi.org/10.1117/12.3034720

KEYWORDS: Etching, Machine learning, Metrology, Modeling, Semiconductor manufacturing, Data modeling, Contour extraction, Simulations, Scanning electron microscopy, Image processing

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