Mr. Reza Qarehbaghi Profile

Reza Qarehbaghi

Research Assistant

SPIE Involvement:

Author

Area of Expertise:

Micro-Opto-Electro-Mechanical Systems (MOEMS) , Grayscale Photomasks , Laser Micromachining , Inorganic Bimetallic Thermal Resists , 3D Micro-Structures Lothography , Computer Engineering

Publications (7)

Proceedings Article | 13 March 2015 Paper

Rapid production of structural color images with optical data storage capabilities

Mohamad Rezaei, Hao Jiang, Reza Qarehbaghi, Mohammad Naghshineh, Bozena Kaminska

Proceedings Volume 9374, 93740O (2015) https://doi.org/10.1117/12.2080719

KEYWORDS: Nanoimprint lithography, Electron beam lithography, Chromium, Polymers, Optical storage, Ultraviolet radiation, Infrared imaging, Photoresist materials, Fabrication, Scanning electron microscopy

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Proceedings Article | 7 March 2014 Paper

Calibrating bimetallic grayscale photomasks to photoresist response for precise micro-optics fabrication

Glenn Chapman, Reza Qarehbaghi, Santiago Roche

Proceedings Volume 8973, 897307 (2014) https://doi.org/10.1117/12.2041429

KEYWORDS: Photomasks, Transparency, Photoresist materials, Calibration, Photoresist processing, Micro optics, Optical lithography, Glasses, Sensors, Absorbance

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Proceedings Article | 8 November 2012 Paper

Bimetallic grayscale photomasks for micro-optics fabrication using dual wavelength laser writing techniques

Reza Qarehbaghi, Glenn Chapman

Proceedings Volume 8522, 85222K (2012) https://doi.org/10.1117/12.977189

KEYWORDS: Photomasks, Argon ion lasers, Sensors, Beam shaping, Modulation, Camera shutters, Micro optics, Optical filters, Binary data, Photoresist materials

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Proceedings Article | 18 February 2012 Paper

Bimetallic grayscale photomasks written using flat-top beam vs. Gaussian beam

Reza Qarehbaghi, Glenn Chapman, Waris Boonyasiriwat

Proceedings Volume 8243, 824305 (2012) https://doi.org/10.1117/12.909543

KEYWORDS: Photomasks, Beam shaping, Sensors, Transparency, Gaussian beams, Binary data, Glasses, Prisms, Digital imaging, Thin films

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Proceedings Article | 14 October 2011 Paper

Improving the accuracy of the bimetallic grayscale photomasks using a feedback controlled flat-top beam

Reza Qarehbaghi, Glenn Chapman, Waris Boonyasiriwat

Proceedings Volume 8166, 816641 (2011) https://doi.org/10.1117/12.898905

KEYWORDS: Photomasks, Beam shaping, Transparency, Raster graphics, Objectives, Optical lithography, Photoresist materials, Sensors, Transmittance, Binary data

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Proceedings Article | 2 March 2011 Paper

Angular-domain imaging of fluorescence sources within tissue phantoms

Rongen L. Cheng, Polly Tsui, Glenn Chapman, Reza Qarehbaghi, Nick Pfeiffer

Proceedings Volume 7897, 78970W (2011) https://doi.org/10.1117/12.875675

KEYWORDS: Scattering, Collimators, Luminescence, Photons, Monte Carlo methods, Tissues, Chromium, Light scattering, Image filtering, Imaging systems

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Proceedings Article | 14 February 2011 Paper

Bimetallic grayscale photomasks written using optical density feedback control

James Dykes, Reza Qarehbaghi, Glenn Chapman

Proceedings Volume 7927, 792719 (2011) https://doi.org/10.1117/12.876234

KEYWORDS: Photomasks, Transparency, Raster graphics, Feedback control, Sensors, Optical lithography, Objectives, Thin films, Argon ion lasers, Absorbance

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Showing 5 of 7 publications

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