Reza Qarehbaghi
Research Assistant
SPIE Involvement:
Author
Area of Expertise:
Micro-Opto-Electro-Mechanical Systems (MOEMS) , Grayscale Photomasks , Laser Micromachining , Inorganic Bimetallic Thermal Resists , 3D Micro-Structures Lothography , Computer Engineering
Publications (7)

Proceedings Article | 13 March 2015 Paper
Proc. SPIE. 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
KEYWORDS: Fabrication, Infrared imaging, Electron beam lithography, Polymers, Ultraviolet radiation, Chromium, Scanning electron microscopy, Photoresist materials, Nanoimprint lithography, Optical storage

Proceedings Article | 7 March 2014 Paper
Proc. SPIE. 8973, Micromachining and Microfabrication Process Technology XIX
KEYWORDS: Transparency, Optical lithography, Sensors, Calibration, Glasses, Photoresist materials, Micro optics, Photomasks, Absorbance, Photoresist processing

Proceedings Article | 8 November 2012 Paper
Proc. SPIE. 8522, Photomask Technology 2012
KEYWORDS: Optical filters, Modulation, Sensors, Argon ion lasers, Photoresist materials, Micro optics, Photomasks, Beam shaping, Binary data, Camera shutters

Proceedings Article | 18 February 2012 Paper
Proc. SPIE. 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII
KEYWORDS: Thin films, Prisms, Transparency, Gaussian beams, Sensors, Glasses, Digital imaging, Photomasks, Beam shaping, Binary data

Proceedings Article | 14 October 2011 Paper
Proc. SPIE. 8166, Photomask Technology 2011
KEYWORDS: Transparency, Optical lithography, Sensors, Photoresist materials, Objectives, Transmittance, Photomasks, Beam shaping, Raster graphics, Binary data

Showing 5 of 7 publications
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