Unspecified Reza Sahraeian Profile

Reza Sahraeian

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Publications (2)

Proceedings Article | 12 November 2024 Presentation + Paper

Pattern selection strategy by clustering for logic EPE monitoring

Roy Anunciado, Konstantin Nechaev, Reza Sahraeian, Jeroen Schouwenberg, Guillaume Schelcher, Shubhankar Das, Wei Peng, Stefan van der Sanden, Harm Dillen

Proceedings Volume 13215, 1321508 (2024) https://doi.org/10.1117/12.3034649

KEYWORDS: Design, Logic, Optical proximity correction, Critical dimension metrology, Logic devices

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Proceedings Article | 10 April 2024 Presentation + Paper

Feature grouping to enable edge placement error-aware process control in multi-feature logic use case

Guillaume Schelcher, Marsil Athayde, Stijn Schoofs, Jeff Hsia, Zuan Khalik, Fahong Li, Konstantin Nechaev, Reza Sahraeian, Amir-Hossein Tamaddon, Victor Blanco, Stefan van der Sanden, Yichen Zhang, Roy Anunciado, Harm Dillen, Philippe Leray

Proceedings Volume 12955, 129550O (2024) https://doi.org/10.1117/12.3010421

KEYWORDS: Semiconducting wafers, Overlay metrology, Cross validation, Process control, Logic, Metrology, Simulations, Scanning electron microscopy, Lithography

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