Dr. Richard Chen Profile

Dr. Richard Chen

at Toppan Chunghwa Electronics Co Ltd

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 20 October 2006 Paper

Star Hoyeh, Richard Chen, Makoto Kozuma, Joann Kuo, Torey Huang, Frank Chen

Proceedings Volume 6349, 63492U (2006) https://doi.org/10.1117/12.686075

KEYWORDS: Ozone, Scanning probe microscopy, Photomasks, Ions, Hydrogen, Reflectivity, Manufacturing, Particles, Plasma, Photoresist processing

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases