Mr. Richard Gaughan Profile

Richard Gaughan

EO Systems Engr at Raytheon

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Author

Publications (4)

Proceedings Article | 11 November 1999 Paper

Visible light interferometer for EUVL system alignment

Richard Gaughan

Proceedings Volume 3782, (1999) https://doi.org/10.1117/12.369216

KEYWORDS: Interferometers, Wavefronts, Cameras, Extreme ultraviolet lithography, Extreme ultraviolet, Optical testing, Monochromatic aberrations, Mirrors, Interferometry, Optical alignment

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Proceedings Article | 25 June 1999 Paper

Sub-100-nm lithographic imaging with an EUV 10X microstepper

John Goldsmith, Kurt Berger, Dan Bozman, Gregory Cardinale, Daniel Folk, Craig Henderson, Donna O'Connell, Avijit Ray-Chaudhuri, Kenneth Stewart, Daniel Tichenor, Henry Chapman, Richard Gaughan, Russell Hudyma, Claude Montcalm, Eberhard Spiller, John Taylor, Jeffrey Williams, Kenneth Goldberg, Eric Gullikson, Patrick Naulleau, Jonathan Cobb

Proceedings Volume 3676, (1999) https://doi.org/10.1117/12.351097

KEYWORDS: Cameras, Extreme ultraviolet, Imaging systems, Lithography, Extreme ultraviolet lithography, Projection systems, Photoresist developing, Photomasks, Wavefronts, Photoresist materials

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Proceedings Article | 25 June 1999 Paper

Direct comparison of EUV and visible-light interferometries

Kenneth Goldberg, Patrick Naulleau, Sang Hun Lee, Chang-Hasnain Chang, Cynthia Bresloff, Richard Gaughan, Henry Chapman, John Goldsmith, Jeffrey Bokor

Proceedings Volume 3676, (1999) https://doi.org/10.1117/12.351138

KEYWORDS: Extreme ultraviolet, Wavefronts, Cameras, Interferometry, Interferometers, Optical coatings, Monochromatic aberrations, Multilayers, Contamination, Lithography

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Proceedings Article | 1 February 1992 Paper

Achieving microradian accuracy with silicon position-sensitive detectors

Richard Gaughan

Proceedings Volume 1619, (1992) https://doi.org/10.1117/12.56854

KEYWORDS: Sensors, Calibration, Fiber optic illuminators, Electronics, Signal processing, Microelectronics, Control systems, Vibration control, Metrology, Silicon

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