In 2007 IPMS and MVIS presented the results of a full colour scanned beam imaging system. In this paper we will in
addition give an update on the technological development on die level since the last paper. The already small die size of
3000 μm × 2300 μm was further reduced to less than 2000 μm × 2000 μm. The new devices consist of a moveable
frame oscillating at frequencies in the range of 700 Hz - 900 Hz and 1400 Hz - 1800 Hz carrying a mirror of 350 μm
diameter in a gimbal mounting. The mirrors oscillate at frequencies in the range of 13-15 kHz. The characteristic
mechanical amplitudes are 21° MSA (mechanical scan angle) for the frame and 28° MSA for the mirror respectively.
Voltages of less than 50 V for the frame and 100 V for the mirror were necessary to accomplish this. The improved
MEMS device design is presented as well as the related measurement results. The images of various objects taken with
an optical system using the former devices are presented revealing the excellent resolution of such a system and
enabling an outlook on the possibilities of the new device.
In 2004, Microvision presented "Scanned Beam Medical Imager" as an introduction to our MEMS-based, full
color scanned beam imaging system. This presentation will provide an update of the technological advancements since
this initial work from 2004. This recent work includes the development of functional prototypes that are much smaller
than previous prototypes using a design architecture that is easily scalable. Performance has been significantly
improved by increasing the optical field of views and video refresh rate. Real-time image processing capabilities have
been developed to enhance the image quality and functionality over a wide range of operating conditions. Actual
images of various objects will be presented.
A new two-dimensional and resonantly driven scanning micro mirror has been simulated, fabricated and characterized.
Features are a small chip size of 2900 μm x 2350 μm with a frame oscillating at frequencies in the range of 1 kHz. The
frame carries a mirror of 500 μm diameter in a gimbal mounting oscillating at frequencies in the range of 16 kHz. The
characteristic mechanical amplitudes are 21o and 28o respectively. Voltages of 60 V and less than 140 V were necessary
to accomplish this. Much higher amplitudes have been achieved on the mirror axis without breaking the torsion bars.
Initial difficulties in realizing the high amplitudes have been overcome by improving the geometry of the suspension.
The initial design is presented as well as the measurement results of the initial and improved design. The device was
used to develop a micro laser camera with high depth of focus. Pictures taken with the system are presented revealing
the excellent resolution.