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Dr. Rick Kneedler
at Thermo Fisher Scientific Inc
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Author
Publications (1)
Proceedings Article | 6 December 2004 Paper
3D metrology solution for the 65-nm node
Rick Kneedler, Sergey Borodyansky, Dimitri Klyachko, Leonid Vasilyev, Alex Buxbaum, Troy Morrison
Proceedings Volume 5567, (2004) https://doi.org/10.1117/12.570122
KEYWORDS: Critical dimension metrology, Photomasks, Metrology, 3D metrology, Atomic force microscopy, Sensors, Scanners, Precision measurement, Edge roughness, Microscopy
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