Dr. Rik van Laarhoven Profile

Dr. Rik van Laarhoven

at ASML Netherlands BV

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Author

Publications (2)

Proceedings Article | 27 April 2023 Presentation + Paper

Soft x-ray: novel metrology for 3D profilometry and device pitch overlay

Christina Porter, Teis Coenen, William Blanton, Sury Ganesan, Niels Geypen, Han-Kwang Nienhuys, Sandy Scholz, Simon Mathijssen, Hugo Cramer, Mark Phillips, Rik van Laarhoven, Loes van Rijswijk, Johan Reinink, Jeroen Ploegmakers, Omar el Gawhary, Andrea Invernizzi, Ricarda Wohrwag, Hugo Jonquiere, Juliane Reinhardt, Peter Engblom, Heidi Chin, David O'Dwyer, Peter Smorenburg, Florian Gstrein, Brian Krist

Proceedings Volume 12496, 124961I (2023) https://doi.org/10.1117/12.2658495

KEYWORDS: Etching, Metrology, Overlay metrology, Signal detection, Diffraction, Semiconducting wafers, 3D metrology, X-rays, Nanosheets, Scatterometry

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Proceedings Article | 28 March 2017 Presentation + Paper

High-NA optical CD metrology on small in-cell targets enabling improved higher order dose control and process control for logic

Hugo Cramer, Elliott Mc Namara, Isabel de la Fuente, Sharon Hsu, Ward Tu, Wade Huang, Rik van Laarhoven, Ram Jaganatharaja, Filippo Belletti, Milos Popadic

Proceedings Volume 10145, 101451B (2017) https://doi.org/10.1117/12.2260268

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Process control, Logic, Etching, Metrology, Scanners, Manufacturing, Wafer testing, Reticles

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